Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser
This paper presents an intentional investigation of the effect of the object tilt angle on the tracking local minimum method (TL method), which is the one for detecting the measurement target position of the object optical axis, in a chromatic confocal probe employing a differential dual-fiber-detec...
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| Format: | Article |
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MDPI AG
2022-05-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/12/9/4736 |
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| author | Ryo Sato Yuki Shimizu Hiraku Matsukuma Wei Gao |
| author_facet | Ryo Sato Yuki Shimizu Hiraku Matsukuma Wei Gao |
| author_sort | Ryo Sato |
| collection | DOAJ |
| description | This paper presents an intentional investigation of the effect of the object tilt angle on the tracking local minimum method (TL method), which is the one for detecting the measurement target position of the object optical axis, in a chromatic confocal probe employing a differential dual-fiber-detector optical system with a mode-locked femtosecond laser as the light source. The effect of the object tilt angle on dual-detector confocal probes, and even chromatic confocal probes, has not been investigated in detail so far, although the effect of object tilt angle on scanning confocal probes has been studied. At first, to examine the influence of the object tilt angle on the TL method, a theoretical model is established, and numerical simulations are performed based on the established theoretical equation. Then, the effect of aberrations in confocal optics on the confocal response curve is investigated in experiments. Finally, investigations on the effect of the object tilt angle on the TL method are demonstrated in experiments. |
| first_indexed | 2024-03-10T04:18:52Z |
| format | Article |
| id | doaj.art-4ca45e5e66d84c22bea4bebd264902ba |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-10T04:18:52Z |
| publishDate | 2022-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-4ca45e5e66d84c22bea4bebd264902ba2023-11-23T07:53:12ZengMDPI AGApplied Sciences2076-34172022-05-01129473610.3390/app12094736Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond LaserRyo Sato0Yuki Shimizu1Hiraku Matsukuma2Wei Gao3Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, JapanDivision of Mechanical and Space Engineering, Graduate School of Engineering, Hokkaido University, Sapporo 060-8628, JapanPrecision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, JapanPrecision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, JapanThis paper presents an intentional investigation of the effect of the object tilt angle on the tracking local minimum method (TL method), which is the one for detecting the measurement target position of the object optical axis, in a chromatic confocal probe employing a differential dual-fiber-detector optical system with a mode-locked femtosecond laser as the light source. The effect of the object tilt angle on dual-detector confocal probes, and even chromatic confocal probes, has not been investigated in detail so far, although the effect of object tilt angle on scanning confocal probes has been studied. At first, to examine the influence of the object tilt angle on the TL method, a theoretical model is established, and numerical simulations are performed based on the established theoretical equation. Then, the effect of aberrations in confocal optics on the confocal response curve is investigated in experiments. Finally, investigations on the effect of the object tilt angle on the TL method are demonstrated in experiments.https://www.mdpi.com/2076-3417/12/9/4736chromatic confocal probeconfocal response curvedual-detector optical systema fiber-detectora mode-locked femtosecond laserthe tracking local minimum method |
| spellingShingle | Ryo Sato Yuki Shimizu Hiraku Matsukuma Wei Gao Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser Applied Sciences chromatic confocal probe confocal response curve dual-detector optical system a fiber-detector a mode-locked femtosecond laser the tracking local minimum method |
| title | Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser |
| title_full | Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser |
| title_fullStr | Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser |
| title_full_unstemmed | Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser |
| title_short | Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser |
| title_sort | influence of surface tilt angle on a chromatic confocal probe with a femtosecond laser |
| topic | chromatic confocal probe confocal response curve dual-detector optical system a fiber-detector a mode-locked femtosecond laser the tracking local minimum method |
| url | https://www.mdpi.com/2076-3417/12/9/4736 |
| work_keys_str_mv | AT ryosato influenceofsurfacetiltangleonachromaticconfocalprobewithafemtosecondlaser AT yukishimizu influenceofsurfacetiltangleonachromaticconfocalprobewithafemtosecondlaser AT hirakumatsukuma influenceofsurfacetiltangleonachromaticconfocalprobewithafemtosecondlaser AT weigao influenceofsurfacetiltangleonachromaticconfocalprobewithafemtosecondlaser |