Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser

This paper presents an intentional investigation of the effect of the object tilt angle on the tracking local minimum method (TL method), which is the one for detecting the measurement target position of the object optical axis, in a chromatic confocal probe employing a differential dual-fiber-detec...

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Bibliographic Details
Main Authors: Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/12/9/4736

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