Fabrication and Characterization of Inverted Silicon Pyramidal Arrays with Randomly Distributed Nanoholes

Fabrication and Characterization of Inverted Silicon Pyramidal Arrays with Randomly Distributed Nanoholes

We report the fabrication, electromagnetic simulation and measurement of inverted silicon pyramidal arrays with randomly distributed nanoholes that act as an anti-reflectivity coating. The fabrication route combines the advantages of anisotropic wet etching and metal-assisted chemical etching. The f...

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Bibliographic Details
Main Authors:	Yue Zhao, Kaiping Zhang, Hailiang Li, Changqing Xie
Format:	Article
Language:	English
Published:	MDPI AG 2021-08-01
Series:	Micromachines
Subjects:	anti-reflectivity broadband metal-assisted chemical etching anisotropic wet etching
Online Access:	https://www.mdpi.com/2072-666X/12/8/931

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