Investigation of New Accelerometer Based on Capacitive Micromachined Ultrasonic Transducer (CMUT) with Ring-Perforation Membrane

Investigation of New Accelerometer Based on Capacitive Micromachined Ultrasonic Transducer (CMUT) with Ring-Perforation Membrane

Capacitive micromachined ultrasonic transducer (CMUT) has been widely studied due to its excellent resonance characteristics and array integration. This paper presents the first study of the CMUT electrostatic stiffness resonant accelerometer. To improve the sensitivity of the CMUT accelerometer, th...

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Bibliographic Details
Main Authors: Luhao Gou, Hongliang Wang, Qi Ding, Yulong Liu, Runze Yang, Feng Zhang, Pengcheng Zhang, Gang Cao
Format: Article
Language:English
Published: MDPI AG 2024-02-01
Series:Micromachines
Subjects:
CMUT
accelerometer
acceleration sensitivity
ring perforations
Online Access:https://www.mdpi.com/2072-666X/15/2/279

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