Research progress in TiO<sub>2</sub> thin film gas sensor
TiO<sub>2</sub> nano-film type gas sensor has the advantages of simple preparation method, high sensitivity, good consistency and miniaturization, and the wide band of TiO<sub>2</sub> semiconductor enables it to greatly improve the performance of the sensor by coating other e...
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Format: | Article |
Language: | zho |
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Journal of Materials Engineering
2020-10-01
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Series: | Cailiao gongcheng |
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Online Access: | http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2019.000515 |
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author | JIN Jia-wei LI Guo-chen ZHANG Ye LI Gong-yi CHU Zeng-yong |
author_facet | JIN Jia-wei LI Guo-chen ZHANG Ye LI Gong-yi CHU Zeng-yong |
author_sort | JIN Jia-wei |
collection | DOAJ |
description | TiO<sub>2</sub> nano-film type gas sensor has the advantages of simple preparation method, high sensitivity, good consistency and miniaturization, and the wide band of TiO<sub>2</sub> semiconductor enables it to greatly improve the performance of the sensor by coating other elements. Nowadays, it has received more and more attention from researchers. In this paper, the research progress of TiO<sub>2</sub> gas sensor at home and abroad was reviewed. The application of TiO<sub>2</sub> thin film gas sensor in the detection of six common reducing gases(H<sub>2</sub>, NH<sub>3</sub>, H<sub>2</sub>S, VOC, CO, SO<sub>2</sub>) and two common oxidizing gases(CO<sub>2</sub> and NO<sub><i>x</i></sub>) was introduced. In the application of gas detection, the sensing performance and sensing mechanism were discussed and the future research and development of TiO<sub>2</sub> thin film gas sensor were prospected such as doping conductive particles, precious metals or metal oxides into TiO<sub>2</sub> to improve its performance, which provides a reference for the study of new gas sensor. |
first_indexed | 2024-04-11T03:04:51Z |
format | Article |
id | doaj.art-4d204c59fb1647a49835dde6ecd9fd19 |
institution | Directory Open Access Journal |
issn | 1001-4381 1001-4381 |
language | zho |
last_indexed | 2024-04-11T03:04:51Z |
publishDate | 2020-10-01 |
publisher | Journal of Materials Engineering |
record_format | Article |
series | Cailiao gongcheng |
spelling | doaj.art-4d204c59fb1647a49835dde6ecd9fd192023-01-02T13:24:41ZzhoJournal of Materials EngineeringCailiao gongcheng1001-43811001-43812020-10-014810283810.11868/j.issn.1001-4381.2019.00051520201003Research progress in TiO<sub>2</sub> thin film gas sensorJIN Jia-wei0LI Guo-chen1ZHANG Ye2LI Gong-yi3CHU Zeng-yong4Department of Biology and Chemistry, National Defense University, Changsha 410072, ChinaDepartment of Biology and Chemistry, National Defense University, Changsha 410072, ChinaDepartment of Biology and Chemistry, National Defense University, Changsha 410072, ChinaDepartment of Biology and Chemistry, National Defense University, Changsha 410072, ChinaDepartment of Biology and Chemistry, National Defense University, Changsha 410072, ChinaTiO<sub>2</sub> nano-film type gas sensor has the advantages of simple preparation method, high sensitivity, good consistency and miniaturization, and the wide band of TiO<sub>2</sub> semiconductor enables it to greatly improve the performance of the sensor by coating other elements. Nowadays, it has received more and more attention from researchers. In this paper, the research progress of TiO<sub>2</sub> gas sensor at home and abroad was reviewed. The application of TiO<sub>2</sub> thin film gas sensor in the detection of six common reducing gases(H<sub>2</sub>, NH<sub>3</sub>, H<sub>2</sub>S, VOC, CO, SO<sub>2</sub>) and two common oxidizing gases(CO<sub>2</sub> and NO<sub><i>x</i></sub>) was introduced. In the application of gas detection, the sensing performance and sensing mechanism were discussed and the future research and development of TiO<sub>2</sub> thin film gas sensor were prospected such as doping conductive particles, precious metals or metal oxides into TiO<sub>2</sub> to improve its performance, which provides a reference for the study of new gas sensor.http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2019.000515tio<sub>2</sub>nano-film typegas sensorsensing performancesensing mechanism |
spellingShingle | JIN Jia-wei LI Guo-chen ZHANG Ye LI Gong-yi CHU Zeng-yong Research progress in TiO<sub>2</sub> thin film gas sensor Cailiao gongcheng tio<sub>2</sub> nano-film type gas sensor sensing performance sensing mechanism |
title | Research progress in TiO<sub>2</sub> thin film gas sensor |
title_full | Research progress in TiO<sub>2</sub> thin film gas sensor |
title_fullStr | Research progress in TiO<sub>2</sub> thin film gas sensor |
title_full_unstemmed | Research progress in TiO<sub>2</sub> thin film gas sensor |
title_short | Research progress in TiO<sub>2</sub> thin film gas sensor |
title_sort | research progress in tio sub 2 sub thin film gas sensor |
topic | tio<sub>2</sub> nano-film type gas sensor sensing performance sensing mechanism |
url | http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2019.000515 |
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