Research progress in TiO<sub>2</sub> thin film gas sensor

TiO<sub>2</sub> nano-film type gas sensor has the advantages of simple preparation method, high sensitivity, good consistency and miniaturization, and the wide band of TiO<sub>2</sub> semiconductor enables it to greatly improve the performance of the sensor by coating other e...

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Main Authors: JIN Jia-wei, LI Guo-chen, ZHANG Ye, LI Gong-yi, CHU Zeng-yong
Format: Article
Language:zho
Published: Journal of Materials Engineering 2020-10-01
Series:Cailiao gongcheng
Subjects:
Online Access:http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2019.000515
_version_ 1828079597030211584
author JIN Jia-wei
LI Guo-chen
ZHANG Ye
LI Gong-yi
CHU Zeng-yong
author_facet JIN Jia-wei
LI Guo-chen
ZHANG Ye
LI Gong-yi
CHU Zeng-yong
author_sort JIN Jia-wei
collection DOAJ
description TiO<sub>2</sub> nano-film type gas sensor has the advantages of simple preparation method, high sensitivity, good consistency and miniaturization, and the wide band of TiO<sub>2</sub> semiconductor enables it to greatly improve the performance of the sensor by coating other elements. Nowadays, it has received more and more attention from researchers. In this paper, the research progress of TiO<sub>2</sub> gas sensor at home and abroad was reviewed. The application of TiO<sub>2</sub> thin film gas sensor in the detection of six common reducing gases(H<sub>2</sub>, NH<sub>3</sub>, H<sub>2</sub>S, VOC, CO, SO<sub>2</sub>) and two common oxidizing gases(CO<sub>2</sub> and NO<sub><i>x</i></sub>) was introduced. In the application of gas detection, the sensing performance and sensing mechanism were discussed and the future research and development of TiO<sub>2</sub> thin film gas sensor were prospected such as doping conductive particles, precious metals or metal oxides into TiO<sub>2</sub> to improve its performance, which provides a reference for the study of new gas sensor.
first_indexed 2024-04-11T03:04:51Z
format Article
id doaj.art-4d204c59fb1647a49835dde6ecd9fd19
institution Directory Open Access Journal
issn 1001-4381
1001-4381
language zho
last_indexed 2024-04-11T03:04:51Z
publishDate 2020-10-01
publisher Journal of Materials Engineering
record_format Article
series Cailiao gongcheng
spelling doaj.art-4d204c59fb1647a49835dde6ecd9fd192023-01-02T13:24:41ZzhoJournal of Materials EngineeringCailiao gongcheng1001-43811001-43812020-10-014810283810.11868/j.issn.1001-4381.2019.00051520201003Research progress in TiO<sub>2</sub> thin film gas sensorJIN Jia-wei0LI Guo-chen1ZHANG Ye2LI Gong-yi3CHU Zeng-yong4Department of Biology and Chemistry, National Defense University, Changsha 410072, ChinaDepartment of Biology and Chemistry, National Defense University, Changsha 410072, ChinaDepartment of Biology and Chemistry, National Defense University, Changsha 410072, ChinaDepartment of Biology and Chemistry, National Defense University, Changsha 410072, ChinaDepartment of Biology and Chemistry, National Defense University, Changsha 410072, ChinaTiO<sub>2</sub> nano-film type gas sensor has the advantages of simple preparation method, high sensitivity, good consistency and miniaturization, and the wide band of TiO<sub>2</sub> semiconductor enables it to greatly improve the performance of the sensor by coating other elements. Nowadays, it has received more and more attention from researchers. In this paper, the research progress of TiO<sub>2</sub> gas sensor at home and abroad was reviewed. The application of TiO<sub>2</sub> thin film gas sensor in the detection of six common reducing gases(H<sub>2</sub>, NH<sub>3</sub>, H<sub>2</sub>S, VOC, CO, SO<sub>2</sub>) and two common oxidizing gases(CO<sub>2</sub> and NO<sub><i>x</i></sub>) was introduced. In the application of gas detection, the sensing performance and sensing mechanism were discussed and the future research and development of TiO<sub>2</sub> thin film gas sensor were prospected such as doping conductive particles, precious metals or metal oxides into TiO<sub>2</sub> to improve its performance, which provides a reference for the study of new gas sensor.http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2019.000515tio<sub>2</sub>nano-film typegas sensorsensing performancesensing mechanism
spellingShingle JIN Jia-wei
LI Guo-chen
ZHANG Ye
LI Gong-yi
CHU Zeng-yong
Research progress in TiO<sub>2</sub> thin film gas sensor
Cailiao gongcheng
tio<sub>2</sub>
nano-film type
gas sensor
sensing performance
sensing mechanism
title Research progress in TiO<sub>2</sub> thin film gas sensor
title_full Research progress in TiO<sub>2</sub> thin film gas sensor
title_fullStr Research progress in TiO<sub>2</sub> thin film gas sensor
title_full_unstemmed Research progress in TiO<sub>2</sub> thin film gas sensor
title_short Research progress in TiO<sub>2</sub> thin film gas sensor
title_sort research progress in tio sub 2 sub thin film gas sensor
topic tio<sub>2</sub>
nano-film type
gas sensor
sensing performance
sensing mechanism
url http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2019.000515
work_keys_str_mv AT jinjiawei researchprogressintiosub2subthinfilmgassensor
AT liguochen researchprogressintiosub2subthinfilmgassensor
AT zhangye researchprogressintiosub2subthinfilmgassensor
AT ligongyi researchprogressintiosub2subthinfilmgassensor
AT chuzengyong researchprogressintiosub2subthinfilmgassensor