Synthesis and piezoelectric properties of freestanding ferroelectric films based on barium strontium titanate
In this work, the membrane structures based on lead-free ferroelectric barium strontium titanate with composition Ba0.8Sr0.2TO3 (BSTO) were fabricated by a magnetron sputtering method. The formation of a single-phase Ba0.8Sr0.2TO3 with thickness of 300 nm sintered on Si substrate is confirmed by XRD...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Pensoft Publishers
2023-12-01
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| Series: | Modern Electronic Materials |
| Online Access: | https://moem.pensoft.net/article/115181/download/pdf/ |