Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

The substrate plays a key role in chemoresistive gas sensors. It acts as mechanical support for the sensing material, hosts the heating element and, also, aids the sensing material in signal transduction. In recent years, a significant improvement in the substrate production process has been achieve...

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Bibliographic Details
Main Authors: Andrea Gaiardo, David Novel, Elia Scattolo, Michele Crivellari, Antonino Picciotto, Francesco Ficorella, Erica Iacob, Alessio Bucciarelli, Luisa Petti, Paolo Lugli, Alvise Bagolini
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Sensors
Subjects:
silicon microheaters
chemoresistive gas sensors
predictive thermal model
mechanical failure analysis
response surface method
Online Access:https://www.mdpi.com/1424-8220/21/3/783

Internet

https://www.mdpi.com/1424-8220/21/3/783

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