Large remnant polarization and great reliability characteristics in W/HZO/W ferroelectric capacitors

Large remnant polarization and great reliability characteristics in W/HZO/W ferroelectric capacitors

In this work, the effect of rapid thermal annealing (RTA) temperature on the ferroelectric polarization in zirconium-doped hafnium oxide (HZO) was studied. To maximize remnant polarization (2Pr), in-plane tensile stress was induced by tungsten electrodes under optimal RTA temperatures. We observed a...

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Bibliographic Details
Main Authors:	Shiva Asapu, James Nicolas Pagaduan, Ye Zhuo, Taehwan Moon, Rivu Midya, Dawei Gao, Jungmin Lee, Qing Wu, Mark Barnell, Sabyasachi Ganguli, Reika Katsumata, Yong Chen, Qiangfei Xia, J. Joshua Yang
Format:	Article
Language:	English
Published:	Frontiers Media S.A. 2022-08-01
Series:	Frontiers in Materials
Subjects:	ferroelectric switching large remnant polarization hafnium-zirconium oxide tungsten rapid thermal annealing
Online Access:	https://www.frontiersin.org/articles/10.3389/fmats.2022.969188/full

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