A New Method to Verify the Measurement Speed and Accuracy of Frequency Modulated Interferometers
The measurement speed and measurement accuracy of a displacement measuring interferometer are key parameters. To verify these parameters, a fast and high-accuracy motion is required. However, the displacement induced by a mechanical actuator generates disadvantageous features, such as slow motion, h...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-06-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/13/5787 |
| _version_ | 1797529213413097472 |
|---|---|
| author | Toan-Thang Vu Thanh-Tung Vu Van-Doanh Tran Thanh-Dong Nguyen Ngoc-Tam Bui |
| author_facet | Toan-Thang Vu Thanh-Tung Vu Van-Doanh Tran Thanh-Dong Nguyen Ngoc-Tam Bui |
| author_sort | Toan-Thang Vu |
| collection | DOAJ |
| description | The measurement speed and measurement accuracy of a displacement measuring interferometer are key parameters. To verify these parameters, a fast and high-accuracy motion is required. However, the displacement induced by a mechanical actuator generates disadvantageous features, such as slow motion, hysteresis, distortion, and vibration. This paper proposes a new method for a nonmechanical high-speed motion using an electro-optic modulator (EOM). The method is based on the principle that all displacement measuring interferometers measure the phase change to calculate the displacement. This means that the EOM can be used to accurately generate phase change rather than a mechanical actuator. The proposed method is then validated by placing the EOM into an arm of a frequency modulation interferometer. By using two lock-in amplifiers, the phase change in an EOM and, hence, the corresponding virtual displacement could be measured by the interferometer. The measurement showed that the system could achieve a displacement at 20 kHz, a speed of 6.08 mm/s, and a displacement noise level < 100 pm//√Hz above 2 kHz. The proposed virtual displacement can be applied to determine both the measurement speed and accuracy of displacement measuring interferometers, such as homodyne interferometers, heterodyne interferometers, and frequency modulated interferometers. |
| first_indexed | 2024-03-10T10:10:33Z |
| format | Article |
| id | doaj.art-4dfd48e472d546d99933cf31e9db5838 |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-10T10:10:33Z |
| publishDate | 2021-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-4dfd48e472d546d99933cf31e9db58382023-11-22T01:14:23ZengMDPI AGApplied Sciences2076-34172021-06-011113578710.3390/app11135787A New Method to Verify the Measurement Speed and Accuracy of Frequency Modulated InterferometersToan-Thang Vu0Thanh-Tung Vu1Van-Doanh Tran2Thanh-Dong Nguyen3Ngoc-Tam Bui4School of Mechanical Engineering, Hanoi University of Science and Technology, Hanoi 100000, VietnamSchool of Mechanical Engineering, Hanoi University of Science and Technology, Hanoi 100000, VietnamSchool of Mechanical Engineering, Hanoi University of Science and Technology, Hanoi 100000, VietnamSchool of Mechanical Engineering, Hanoi University of Science and Technology, Hanoi 100000, VietnamSchool of Mechanical Engineering, Hanoi University of Science and Technology, Hanoi 100000, VietnamThe measurement speed and measurement accuracy of a displacement measuring interferometer are key parameters. To verify these parameters, a fast and high-accuracy motion is required. However, the displacement induced by a mechanical actuator generates disadvantageous features, such as slow motion, hysteresis, distortion, and vibration. This paper proposes a new method for a nonmechanical high-speed motion using an electro-optic modulator (EOM). The method is based on the principle that all displacement measuring interferometers measure the phase change to calculate the displacement. This means that the EOM can be used to accurately generate phase change rather than a mechanical actuator. The proposed method is then validated by placing the EOM into an arm of a frequency modulation interferometer. By using two lock-in amplifiers, the phase change in an EOM and, hence, the corresponding virtual displacement could be measured by the interferometer. The measurement showed that the system could achieve a displacement at 20 kHz, a speed of 6.08 mm/s, and a displacement noise level < 100 pm//√Hz above 2 kHz. The proposed virtual displacement can be applied to determine both the measurement speed and accuracy of displacement measuring interferometers, such as homodyne interferometers, heterodyne interferometers, and frequency modulated interferometers.https://www.mdpi.com/2076-3417/11/13/5787electro-optic modulatorfrequency modulationdisplacement measuring interferometer |
| spellingShingle | Toan-Thang Vu Thanh-Tung Vu Van-Doanh Tran Thanh-Dong Nguyen Ngoc-Tam Bui A New Method to Verify the Measurement Speed and Accuracy of Frequency Modulated Interferometers Applied Sciences electro-optic modulator frequency modulation displacement measuring interferometer |
| title | A New Method to Verify the Measurement Speed and Accuracy of Frequency Modulated Interferometers |
| title_full | A New Method to Verify the Measurement Speed and Accuracy of Frequency Modulated Interferometers |
| title_fullStr | A New Method to Verify the Measurement Speed and Accuracy of Frequency Modulated Interferometers |
| title_full_unstemmed | A New Method to Verify the Measurement Speed and Accuracy of Frequency Modulated Interferometers |
| title_short | A New Method to Verify the Measurement Speed and Accuracy of Frequency Modulated Interferometers |
| title_sort | new method to verify the measurement speed and accuracy of frequency modulated interferometers |
| topic | electro-optic modulator frequency modulation displacement measuring interferometer |
| url | https://www.mdpi.com/2076-3417/11/13/5787 |
| work_keys_str_mv | AT toanthangvu anewmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers AT thanhtungvu anewmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers AT vandoanhtran anewmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers AT thanhdongnguyen anewmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers AT ngoctambui anewmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers AT toanthangvu newmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers AT thanhtungvu newmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers AT vandoanhtran newmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers AT thanhdongnguyen newmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers AT ngoctambui newmethodtoverifythemeasurementspeedandaccuracyoffrequencymodulatedinterferometers |