Study on the influence of standoff distance on substrate damage under an abrasive water jet process by molecular dynamics simulation
Abstract The process of a cluster-containing water jet impinging on a monocrystalline silicon substrate was studied by molecular dynamics simulation. The results show that as the standoff distance increases, the jet will gradually diverge. As a result, the solidified water film between the cluster a...
Main Authors: | Ruling Chen, Di Zhang, Yihua Wu |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2017-10-01
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Series: | Friction |
Subjects: | |
Online Access: | http://link.springer.com/article/10.1007/s40544-017-0168-4 |
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