Microsphere-Based Microsensor for Miniature Motors’ Vibration Measurement

We present a microsphere-based microsensor that can measure the vibrations of the miniature motor shaft (MMS) in a small space. The microsensor is composed of a stretched fiber and a microsphere with a diameter of 5 μm. When a light source is incident on the microsphere surface, the microsphere indu...

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Bibliographic Details
Main Authors: Kaichuan Xu, Chunlei Jiang, Qilu Ban, Pan Dai, Yaqiang Fan, Shijie Yang, Yue Zhang, Jiacheng Wang, Yu Wang, Xiangfei Chen, Jie Zeng, Feng Wang
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/23/22/9196