Ultra-high precision CMMs and their associated tactile or/and optical scanning probes

Ultra-high precision CMMs and their associated tactile or/and optical scanning probes

Optical and tactile single scanning probes usually are used in dimensional metrology applications, especially for roughness, form, thickness and surface profile measurements. To perform assessments with nanometre level of accuracy, specific ultra-high precision machines...

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Bibliographic Details
Main Authors: Nouira H., Bergmans R.H., Küng A., Piree H., Henselmans R., Spaan H.A.M.
Format: Article
Language:English
Published: EDP Sciences 2014-01-01
Series:International Journal of Metrology and Quality Engineering
Subjects:
Measuring machine
chromatic confocal probe
tactile probe
error sources
dimensional and mechanical metrology
evaluation
Online Access:https://doi.org/10.1051/ijmqe/2014009

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