Topology-optimized 2D silicon–air phononic crystal slabs for enhancing quality factor of laterally vibrating resonators
Two-dimensional phononic crystal (PnC) slabs have shown advantages in enhancing the quality factors Q of piezoelectric laterally vibrating resonators (LVRs) through topology optimization. However, the narrow geometries of most topology-optimized silicon–air 2D PnC slabs face significant fabrication...
| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | English |
| Publicado em: |
AIP Publishing LLC
2025-03-01
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| Colecção: | Nanotechnology and Precision Engineering |
| Acesso em linha: | http://dx.doi.org/10.1063/10.0028829 |