Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices

Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this pap...

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Main Authors: Manel Puig-Vidal, Manuel Carmona, Laura González, Luis Botaya, Jorge Otero, Roger Oria
Format: Article
Language:English
Published: MDPI AG 2013-05-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/13/6/7156
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author Manel Puig-Vidal
Manuel Carmona
Laura González
Luis Botaya
Jorge Otero
Roger Oria
author_facet Manel Puig-Vidal
Manuel Carmona
Laura González
Luis Botaya
Jorge Otero
Roger Oria
author_sort Manel Puig-Vidal
collection DOAJ
description Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement.
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spelling doaj.art-4fc6f25170084a67bbe37c8a4fdba4ba2022-12-22T04:01:43ZengMDPI AGSensors1424-82202013-05-011367156716910.3390/s130607156Finite Element Analysis of Electrically Excited Quartz Tuning Fork DevicesManel Puig-VidalManuel CarmonaLaura GonzálezLuis BotayaJorge OteroRoger OriaQuartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement.http://www.mdpi.com/1424-8220/13/6/7156quartz tuning forkfinite element modelingpiezoelectric sensors
spellingShingle Manel Puig-Vidal
Manuel Carmona
Laura González
Luis Botaya
Jorge Otero
Roger Oria
Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices
Sensors
quartz tuning fork
finite element modeling
piezoelectric sensors
title Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices
title_full Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices
title_fullStr Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices
title_full_unstemmed Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices
title_short Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices
title_sort finite element analysis of electrically excited quartz tuning fork devices
topic quartz tuning fork
finite element modeling
piezoelectric sensors
url http://www.mdpi.com/1424-8220/13/6/7156
work_keys_str_mv AT manelpuigvidal finiteelementanalysisofelectricallyexcitedquartztuningforkdevices
AT manuelcarmona finiteelementanalysisofelectricallyexcitedquartztuningforkdevices
AT lauragonzalez finiteelementanalysisofelectricallyexcitedquartztuningforkdevices
AT luisbotaya finiteelementanalysisofelectricallyexcitedquartztuningforkdevices
AT jorgeotero finiteelementanalysisofelectricallyexcitedquartztuningforkdevices
AT rogeroria finiteelementanalysisofelectricallyexcitedquartztuningforkdevices