Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices
Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this pap...
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Format: | Article |
Language: | English |
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MDPI AG
2013-05-01
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Series: | Sensors |
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Online Access: | http://www.mdpi.com/1424-8220/13/6/7156 |
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author | Manel Puig-Vidal Manuel Carmona Laura González Luis Botaya Jorge Otero Roger Oria |
author_facet | Manel Puig-Vidal Manuel Carmona Laura González Luis Botaya Jorge Otero Roger Oria |
author_sort | Manel Puig-Vidal |
collection | DOAJ |
description | Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement. |
first_indexed | 2024-04-11T21:36:29Z |
format | Article |
id | doaj.art-4fc6f25170084a67bbe37c8a4fdba4ba |
institution | Directory Open Access Journal |
issn | 1424-8220 |
language | English |
last_indexed | 2024-04-11T21:36:29Z |
publishDate | 2013-05-01 |
publisher | MDPI AG |
record_format | Article |
series | Sensors |
spelling | doaj.art-4fc6f25170084a67bbe37c8a4fdba4ba2022-12-22T04:01:43ZengMDPI AGSensors1424-82202013-05-011367156716910.3390/s130607156Finite Element Analysis of Electrically Excited Quartz Tuning Fork DevicesManel Puig-VidalManuel CarmonaLaura GonzálezLuis BotayaJorge OteroRoger OriaQuartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement.http://www.mdpi.com/1424-8220/13/6/7156quartz tuning forkfinite element modelingpiezoelectric sensors |
spellingShingle | Manel Puig-Vidal Manuel Carmona Laura González Luis Botaya Jorge Otero Roger Oria Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices Sensors quartz tuning fork finite element modeling piezoelectric sensors |
title | Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices |
title_full | Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices |
title_fullStr | Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices |
title_full_unstemmed | Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices |
title_short | Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices |
title_sort | finite element analysis of electrically excited quartz tuning fork devices |
topic | quartz tuning fork finite element modeling piezoelectric sensors |
url | http://www.mdpi.com/1424-8220/13/6/7156 |
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