Electrochemical Lithium Insertion into TiO2 Anatase ALD Thin Films for Li‐Ion Microbatteries: An Atomic‐Scale Picture Provided by Raman Spectroscopy

Electrochemical Lithium Insertion into TiO2 Anatase ALD Thin Films for Li‐Ion Microbatteries: An Atomic‐Scale Picture Provided by Raman Spectroscopy

Abstract Electrochemical lithium (de)intercalation in an atomic layer deposited (ALD) TiO2 anatase thin film deposited on a planar Si /Al2O3/Pt substrate is investigated by Raman spectroscopy. An initial discharge capacity of 63 µAh cm−2 µm−1 (0.5 Li+ mole−1) is reached at C/10 rate, which increases...

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Bibliographic Details
Main Authors: Ankush Bhatia, Maxime Hallot, Clément Leviel, Pascal Roussel, Jean‐Pierre Pereira‐Ramos, Christophe Lethien, Rita Baddour‐Hadjean
Format: Article
Language:English
Published: Wiley-VCH 2023-04-01
Series:Advanced Materials Interfaces
Subjects:
anode materials
atomic layer deposition
Li‐ion micro‐batteries
lithiated titanate Li 0.5TiO 2
Raman spectroscopy
thin film
Online Access:https://doi.org/10.1002/admi.202202141

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