Effect of the Degree of Li<sub>3</sub>PO<sub>4</sub> Vapor Dissociation on the Ionic Conductivity of LiPON Thin Films

Effect of the Degree of Li<sub>3</sub>PO<sub>4</sub> Vapor Dissociation on the Ionic Conductivity of LiPON Thin Films

Thin films of solid-state lithium-ion electrolytes show promise for use in small-sized autonomous power sources for micro- and nanoelectronic elements. The high rate of vacuum-plasma synthesis (~0.5 μm/h) of lithium phosphor-oxynitride (LiPON) films with an ionic conductivity of ~2·10<sup>−6&l...

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Bibliographic Details
Main Authors:	Alexander Kamenetskikh, Nikolay Gavrilov, Alexey Ershov, Petr Tretnikov
Format:	Article
Language:	English
Published:	MDPI AG 2023-10-01
Series:	Membranes
Subjects:	solid electrolyte LiPON anodic evaporation ionic conductivity
Online Access:	https://www.mdpi.com/2077-0375/13/10/847

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