Thermal conductivity of sputtered amorphous Ge films

We measured the thermal conductivity of amorphous Ge films prepared by magnetron sputtering. The thermal conductivity was significantly higher than the value predicted by the minimum thermal conductivity model and increased with deposition temperature. We found that variations in sound velocity and...

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Main Authors: Tianzhuo Zhan, Yibin Xu, Masahiro Goto, Yoshihisa Tanaka, Ryozo Kato, Michiko Sasaki, Yutaka Kagawa
Format: Article
Language:English
Published: AIP Publishing LLC 2014-02-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4867122
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author Tianzhuo Zhan
Yibin Xu
Masahiro Goto
Yoshihisa Tanaka
Ryozo Kato
Michiko Sasaki
Yutaka Kagawa
author_facet Tianzhuo Zhan
Yibin Xu
Masahiro Goto
Yoshihisa Tanaka
Ryozo Kato
Michiko Sasaki
Yutaka Kagawa
author_sort Tianzhuo Zhan
collection DOAJ
description We measured the thermal conductivity of amorphous Ge films prepared by magnetron sputtering. The thermal conductivity was significantly higher than the value predicted by the minimum thermal conductivity model and increased with deposition temperature. We found that variations in sound velocity and Ge film density were not the main factors in the high thermal conductivity. Fast Fourier transform patterns of transmission electron micrographs revealed that short-range order in the Ge films was responsible for their high thermal conductivity. The results provide experimental evidences to understand the underlying nature of the variation of phonon mean free path in amorphous solids.
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spelling doaj.art-50add3161be54247887b5e281da924d82022-12-22T01:14:34ZengAIP Publishing LLCAIP Advances2158-32262014-02-0142027126027126-710.1063/1.4867122028402ADVThermal conductivity of sputtered amorphous Ge filmsTianzhuo Zhan0Yibin Xu1Masahiro Goto2Yoshihisa Tanaka3Ryozo Kato4Michiko Sasaki5Yutaka Kagawa6National Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, JapanNational Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, JapanNational Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, JapanNational Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, JapanNational Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, JapanNational Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, JapanNational Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, JapanWe measured the thermal conductivity of amorphous Ge films prepared by magnetron sputtering. The thermal conductivity was significantly higher than the value predicted by the minimum thermal conductivity model and increased with deposition temperature. We found that variations in sound velocity and Ge film density were not the main factors in the high thermal conductivity. Fast Fourier transform patterns of transmission electron micrographs revealed that short-range order in the Ge films was responsible for their high thermal conductivity. The results provide experimental evidences to understand the underlying nature of the variation of phonon mean free path in amorphous solids.http://dx.doi.org/10.1063/1.4867122
spellingShingle Tianzhuo Zhan
Yibin Xu
Masahiro Goto
Yoshihisa Tanaka
Ryozo Kato
Michiko Sasaki
Yutaka Kagawa
Thermal conductivity of sputtered amorphous Ge films
AIP Advances
title Thermal conductivity of sputtered amorphous Ge films
title_full Thermal conductivity of sputtered amorphous Ge films
title_fullStr Thermal conductivity of sputtered amorphous Ge films
title_full_unstemmed Thermal conductivity of sputtered amorphous Ge films
title_short Thermal conductivity of sputtered amorphous Ge films
title_sort thermal conductivity of sputtered amorphous ge films
url http://dx.doi.org/10.1063/1.4867122
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AT yoshihisatanaka thermalconductivityofsputteredamorphousgefilms
AT ryozokato thermalconductivityofsputteredamorphousgefilms
AT michikosasaki thermalconductivityofsputteredamorphousgefilms
AT yutakakagawa thermalconductivityofsputteredamorphousgefilms