Modeling and Control Design of a Contact-Based, Electrostatically Actuated Rotating Sphere

The performance of micromirrors in terms of their maximum deflection is often limited due to mechanical constraints in the design. To increase the range of achievable deflection angles, we present a novel concept in which a free-lying sphere with a flat side as reflector can be rotated. Due to the l...

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Bibliographic Details
Main Authors: Michael Olbrich, Mario Farny, Martin Hoffmann, Christoph Ament
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Actuators
Subjects:
Online Access:https://www.mdpi.com/2076-0825/11/3/90

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