A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections
Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling o...
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| Format: | Article |
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MDPI AG
2021-06-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/6/714 |
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| author | JiuJiang Wang Xin Liu YuanYu Yu Yao Li ChingHsiang Cheng Shuang Zhang PengUn Mak MangI Vai SioHang Pun |
| author_facet | JiuJiang Wang Xin Liu YuanYu Yu Yao Li ChingHsiang Cheng Shuang Zhang PengUn Mak MangI Vai SioHang Pun |
| author_sort | JiuJiang Wang |
| collection | DOAJ |
| description | Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections. |
| first_indexed | 2024-03-10T10:17:29Z |
| format | Article |
| id | doaj.art-5162128b8ce648b59617082935410ab8 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T10:17:29Z |
| publishDate | 2021-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-5162128b8ce648b59617082935410ab82023-11-22T00:41:00ZengMDPI AGMicromachines2072-666X2021-06-0112671410.3390/mi12060714A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane DeflectionsJiuJiang Wang0Xin Liu1YuanYu Yu2Yao Li3ChingHsiang Cheng4Shuang Zhang5PengUn Mak6MangI Vai7SioHang Pun8College of Computer Science and AI, Neijiang Normal University, Neijiang 641100, ChinaState Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, ChinaCollege of Computer Science and AI, Neijiang Normal University, Neijiang 641100, ChinaCollege of Computer Science and AI, Neijiang Normal University, Neijiang 641100, ChinaSchool of Automotive Engineering, Wuhan University of Technology, Wuhan 430070, ChinaCollege of Computer Science and AI, Neijiang Normal University, Neijiang 641100, ChinaDepartment of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau, Macau 999078, ChinaState Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, ChinaState Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, ChinaAnalytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.https://www.mdpi.com/2072-666X/12/6/714analytical modelingcapacitive micromachined ultrasonic transducer (CMUT)collapse modecollapse voltagemembrane deflection |
| spellingShingle | JiuJiang Wang Xin Liu YuanYu Yu Yao Li ChingHsiang Cheng Shuang Zhang PengUn Mak MangI Vai SioHang Pun A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections Micromachines analytical modeling capacitive micromachined ultrasonic transducer (CMUT) collapse mode collapse voltage membrane deflection |
| title | A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections |
| title_full | A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections |
| title_fullStr | A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections |
| title_full_unstemmed | A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections |
| title_short | A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections |
| title_sort | review on analytical modeling for collapse mode capacitive micromachined ultrasonic transducer of the collapse voltage and the static membrane deflections |
| topic | analytical modeling capacitive micromachined ultrasonic transducer (CMUT) collapse mode collapse voltage membrane deflection |
| url | https://www.mdpi.com/2072-666X/12/6/714 |
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