A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling o...

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Bibliographic Details
Main Authors: JiuJiang Wang, Xin Liu, YuanYu Yu, Yao Li, ChingHsiang Cheng, Shuang Zhang, PengUn Mak, MangI Vai, SioHang Pun
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Micromachines
Subjects:
analytical modeling
capacitive micromachined ultrasonic transducer (CMUT)
collapse mode
collapse voltage
membrane deflection
Online Access:https://www.mdpi.com/2072-666X/12/6/714

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