Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit
In this paper, a Micro-Electro-Mechanical Systems (MEMS) calorimetric sensor with its measurement electronics is designed, fabricated, and tested. The idea is to apply a configurable voltage to the sensitive resistor and measure the current flowing through the heating resistor using a current mirror...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-05-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/10/10/3405 |
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| author | Jamel Nebhen Khaled Alnowaiser Sofiene Mansouri |
| author_facet | Jamel Nebhen Khaled Alnowaiser Sofiene Mansouri |
| author_sort | Jamel Nebhen |
| collection | DOAJ |
| description | In this paper, a Micro-Electro-Mechanical Systems (MEMS) calorimetric sensor with its measurement electronics is designed, fabricated, and tested. The idea is to apply a configurable voltage to the sensitive resistor and measure the current flowing through the heating resistor using a current mirror controlled by an analog feedback loop. In order to cancel the offset and errors of the amplifier, the constant temperature anemometer (CTA) circuit is periodically calibrated. This technique improves the accuracy of the measurement and allows high sensitivity and high bandwidth frequency. The CTA circuit is implemented in a CMOS FD-SOI 28 nm technology. The supply voltage is 1.2 V while the core area is 0.266 mm<sup>2</sup>. Experimental results demonstrate the feasibility of the MEMS calorimetric sensor for measuring airflow rate. The developed MEMS calorimetric sensor shows a maximum normalized sensitivity of 117 mV/(m/s)/mW with respect to the input heating power and a wide dynamic flow range of 0–26 m/s. The high sensitivity and wide dynamic range achieved by our MEMS flow sensor enable its deployment as a promising sensing node for direct wall shear stress measurement applications. |
| first_indexed | 2024-03-10T19:50:30Z |
| format | Article |
| id | doaj.art-517e2ae40a3e4a71b5fb9fe3baaa60aa |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-10T19:50:30Z |
| publishDate | 2020-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-517e2ae40a3e4a71b5fb9fe3baaa60aa2023-11-20T00:27:01ZengMDPI AGApplied Sciences2076-34172020-05-011010340510.3390/app10103405Constant Temperature Anemometer with Self-Calibration Closed Loop CircuitJamel Nebhen0Khaled Alnowaiser1Sofiene Mansouri2College of Computer Engineering and Sciences, Prince Sattam bin Abdulaziz University, Alkharj 11942, Saudi ArabiaCollege of Computer Engineering and Sciences, Prince Sattam bin Abdulaziz University, Alkharj 11942, Saudi ArabiaCollege of Applied Medical Sciences, Prince Sattam bin Abdulaziz University, Alkharj 11942, Saudi ArabiaIn this paper, a Micro-Electro-Mechanical Systems (MEMS) calorimetric sensor with its measurement electronics is designed, fabricated, and tested. The idea is to apply a configurable voltage to the sensitive resistor and measure the current flowing through the heating resistor using a current mirror controlled by an analog feedback loop. In order to cancel the offset and errors of the amplifier, the constant temperature anemometer (CTA) circuit is periodically calibrated. This technique improves the accuracy of the measurement and allows high sensitivity and high bandwidth frequency. The CTA circuit is implemented in a CMOS FD-SOI 28 nm technology. The supply voltage is 1.2 V while the core area is 0.266 mm<sup>2</sup>. Experimental results demonstrate the feasibility of the MEMS calorimetric sensor for measuring airflow rate. The developed MEMS calorimetric sensor shows a maximum normalized sensitivity of 117 mV/(m/s)/mW with respect to the input heating power and a wide dynamic flow range of 0–26 m/s. The high sensitivity and wide dynamic range achieved by our MEMS flow sensor enable its deployment as a promising sensing node for direct wall shear stress measurement applications.https://www.mdpi.com/2076-3417/10/10/3405MEMS calorimetric sensorCTA circuitamplifierheating resistorhot-wire anemometer |
| spellingShingle | Jamel Nebhen Khaled Alnowaiser Sofiene Mansouri Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit Applied Sciences MEMS calorimetric sensor CTA circuit amplifier heating resistor hot-wire anemometer |
| title | Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit |
| title_full | Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit |
| title_fullStr | Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit |
| title_full_unstemmed | Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit |
| title_short | Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit |
| title_sort | constant temperature anemometer with self calibration closed loop circuit |
| topic | MEMS calorimetric sensor CTA circuit amplifier heating resistor hot-wire anemometer |
| url | https://www.mdpi.com/2076-3417/10/10/3405 |
| work_keys_str_mv | AT jamelnebhen constanttemperatureanemometerwithselfcalibrationclosedloopcircuit AT khaledalnowaiser constanttemperatureanemometerwithselfcalibrationclosedloopcircuit AT sofienemansouri constanttemperatureanemometerwithselfcalibrationclosedloopcircuit |