The Development and Progress of Multi-Physics Simulation Design for TSV-Based 3D Integrated System

In order to meet the requirements of high performance, miniaturization, low cost, low power consumption and multi-function, three-dimensional (3D) integrated technology has gradually become a core technology. With the development of 3D integrated technology, it has been used in imaging sensors, opti...

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Bibliographic Details
Main Authors: Xianglong Wang, Dongdong Chen, Di Li, Chen Kou, Yintang Yang
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Symmetry
Subjects:
Online Access:https://www.mdpi.com/2073-8994/15/2/418