Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes
<p>Abstract</p> <p>Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs). Constrained by the structure and shape of the membrane, the determinis...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
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SpringerOpen
2011-01-01
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Series: | Nanoscale Research Letters |
Online Access: | http://www.nanoscalereslett.com/content/6/1/215 |
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author | Harazim Stefan Feng Ping Sanchez Samuel Deneke Christoph Mei Yongfeng Schmidt Oliver |
author_facet | Harazim Stefan Feng Ping Sanchez Samuel Deneke Christoph Mei Yongfeng Schmidt Oliver |
author_sort | Harazim Stefan |
collection | DOAJ |
description | <p>Abstract</p> <p>Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs). Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a versatile variation of channel types such as straight two-way channels, three-way branched channels, or even four-way intersection channels. The fabrication of straight channels is well controllable and offers the opportunity to integrate multiple IFET devices into a single chip. Thus, several IFETs are fabricated on a single chip using a III-V semiconductor substrate to control the ion separation and to measure the ion current of a diluted potassium chloride electrolyte solution.</p> |
first_indexed | 2024-03-12T19:04:08Z |
format | Article |
id | doaj.art-532298d1a5264372951f6f078c53b64d |
institution | Directory Open Access Journal |
issn | 1931-7573 1556-276X |
language | English |
last_indexed | 2024-03-12T19:04:08Z |
publishDate | 2011-01-01 |
publisher | SpringerOpen |
record_format | Article |
series | Nanoscale Research Letters |
spelling | doaj.art-532298d1a5264372951f6f078c53b64d2023-08-02T06:22:19ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2011-01-0161215Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranesHarazim StefanFeng PingSanchez SamuelDeneke ChristophMei YongfengSchmidt Oliver<p>Abstract</p> <p>Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs). Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a versatile variation of channel types such as straight two-way channels, three-way branched channels, or even four-way intersection channels. The fabrication of straight channels is well controllable and offers the opportunity to integrate multiple IFET devices into a single chip. Thus, several IFETs are fabricated on a single chip using a III-V semiconductor substrate to control the ion separation and to measure the ion current of a diluted potassium chloride electrolyte solution.</p>http://www.nanoscalereslett.com/content/6/1/215 |
spellingShingle | Harazim Stefan Feng Ping Sanchez Samuel Deneke Christoph Mei Yongfeng Schmidt Oliver Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes Nanoscale Research Letters |
title | Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes |
title_full | Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes |
title_fullStr | Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes |
title_full_unstemmed | Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes |
title_short | Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes |
title_sort | integrated sensitive on chip ion field effect transistors based on wrinkled ingaas nanomembranes |
url | http://www.nanoscalereslett.com/content/6/1/215 |
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