Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor

Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor

Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor i...

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Bibliographic Details
Main Authors: John Ojur Dennis, Farooq Ahmad, M. Haris Bin Md Khir, Nor Hisham Bin Hamid
Format: Article
Language:English
Published: MDPI AG 2015-07-01
Series:Sensors
Subjects:
CMOS-MEMS
Lorentz force
optical characterization
magnetic sensor
optical sensing
resonator
Online Access:http://www.mdpi.com/1424-8220/15/8/18256

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