Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure
In this study, bismuth trioxide (Bi<sub>2</sub>O<sub>3</sub>) membranes in an electrolyte–insulator–semiconductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing performance, the membranes were treated with two types of plasma—NH<sub>...
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| Format: | Article |
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MDPI AG
2022-02-01
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| Series: | Membranes |
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| Online Access: | https://www.mdpi.com/2077-0375/12/2/188 |
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| author | Chyuan-Haur Kao Kuan-Lin Chen Yi-Shiang Chiu Lin Sang Hao Shih-Ming Chen Ming-Hsien Li Ming-Ling Lee Hsiang Chen |
| author_facet | Chyuan-Haur Kao Kuan-Lin Chen Yi-Shiang Chiu Lin Sang Hao Shih-Ming Chen Ming-Hsien Li Ming-Ling Lee Hsiang Chen |
| author_sort | Chyuan-Haur Kao |
| collection | DOAJ |
| description | In this study, bismuth trioxide (Bi<sub>2</sub>O<sub>3</sub>) membranes in an electrolyte–insulator–semiconductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing performance, the membranes were treated with two types of plasma—NH<sub>3</sub> and N<sub>2</sub>O. To investigate the material property improvements, multiple material characterizations were conducted. Material analysis results indicate that plasma treatments with appropriate time could enhance the crystallization, remove the silicate and facilitate crystallizations. Owing to the material optimizations, the pH sensing capability could be greatly boosted. NH<sub>3</sub> or N<sub>2</sub>O plasma treated-Bi<sub>2</sub>O<sub>3</sub> membranes could reach the pH sensitivity around 60 mV/pH and show promise for future biomedical applications. |
| first_indexed | 2024-03-09T21:28:26Z |
| format | Article |
| id | doaj.art-539a5dd61cb24042864513a89875a3f9 |
| institution | Directory Open Access Journal |
| issn | 2077-0375 |
| language | English |
| last_indexed | 2024-03-09T21:28:26Z |
| publishDate | 2022-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Membranes |
| spelling | doaj.art-539a5dd61cb24042864513a89875a3f92023-11-23T21:03:14ZengMDPI AGMembranes2077-03752022-02-0112218810.3390/membranes12020188Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor StructureChyuan-Haur Kao0Kuan-Lin Chen1Yi-Shiang Chiu2Lin Sang Hao3Shih-Ming Chen4Ming-Hsien Li5Ming-Ling Lee6Hsiang Chen7Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan District, Taoyuan City 333, TaiwanDepartment of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan District, Taoyuan City 333, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, TaiwanDepartment of Electro-Optical Engineering, Minghsin University of Science and Technology, No. 1, Xinxing Road, Xinfeng, Hsinchu 30401, TaiwanDepartment of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, TaiwanIn this study, bismuth trioxide (Bi<sub>2</sub>O<sub>3</sub>) membranes in an electrolyte–insulator–semiconductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing performance, the membranes were treated with two types of plasma—NH<sub>3</sub> and N<sub>2</sub>O. To investigate the material property improvements, multiple material characterizations were conducted. Material analysis results indicate that plasma treatments with appropriate time could enhance the crystallization, remove the silicate and facilitate crystallizations. Owing to the material optimizations, the pH sensing capability could be greatly boosted. NH<sub>3</sub> or N<sub>2</sub>O plasma treated-Bi<sub>2</sub>O<sub>3</sub> membranes could reach the pH sensitivity around 60 mV/pH and show promise for future biomedical applications.https://www.mdpi.com/2077-0375/12/2/188bismuth trioxideplasma treatmentNH<sub>3</sub> and N<sub>2</sub>Onitrogen passivationgrainization |
| spellingShingle | Chyuan-Haur Kao Kuan-Lin Chen Yi-Shiang Chiu Lin Sang Hao Shih-Ming Chen Ming-Hsien Li Ming-Ling Lee Hsiang Chen Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure Membranes bismuth trioxide plasma treatment NH<sub>3</sub> and N<sub>2</sub>O nitrogen passivation grainization |
| title | Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure |
| title_full | Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure |
| title_fullStr | Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure |
| title_full_unstemmed | Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure |
| title_short | Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure |
| title_sort | comparison of nh sub 3 sub and n sub 2 sub o plasma treatments on bi sub 2 sub o sub 3 sub sensing membranes applied in an electrolyte insulator semiconductor structure |
| topic | bismuth trioxide plasma treatment NH<sub>3</sub> and N<sub>2</sub>O nitrogen passivation grainization |
| url | https://www.mdpi.com/2077-0375/12/2/188 |
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