Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure

Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure

In this study, bismuth trioxide (Bi<sub>2</sub>O<sub>3</sub>) membranes in an electrolyte–insulator–semiconductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing performance, the membranes were treated with two types of plasma—NH<sub>...

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Bibliographic Details
Main Authors: Chyuan-Haur Kao, Kuan-Lin Chen, Yi-Shiang Chiu, Lin Sang Hao, Shih-Ming Chen, Ming-Hsien Li, Ming-Ling Lee, Hsiang Chen
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Membranes
Subjects:
bismuth trioxide
plasma treatment
NH<sub>3</sub> and N<sub>2</sub>O
nitrogen passivation
grainization
Online Access:https://www.mdpi.com/2077-0375/12/2/188

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