Characterization of damage morphology of structural SiO2 film induced by nanosecond pulsed laser
We investigated the damage morphology of porous silicon oxide film with a periodic hexagonal hole array irradiated by nanosecond pulsed laser, both experimentally and numerically. To understand the damage morphology, the temperature field distribution and the thermal stress distribution during the l...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2022-07-01
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| Series: | Open Physics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/phys-2022-0060 |
| _version_ | 1797998577927061504 |
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| author | Li Yuan Su Junhong Xu Junqi Yang Guoliang |
| author_facet | Li Yuan Su Junhong Xu Junqi Yang Guoliang |
| author_sort | Li Yuan |
| collection | DOAJ |
| description | We investigated the damage morphology of porous silicon oxide film with a periodic hexagonal hole array irradiated by nanosecond pulsed laser, both experimentally and numerically. To understand the damage morphology, the temperature field distribution and the thermal stress distribution during the laser radiation process were investigated by finite element method. The simulation results show that the thermal stress regulated by periodic structural surface is the reason for the circumferential and discrete distribution of the damage points. The results provide ideas for improving the laser damage resistance of the structural surfaces. |
| first_indexed | 2024-04-11T10:50:56Z |
| format | Article |
| id | doaj.art-53a74b12072445e8bc5b3f113f19b6d1 |
| institution | Directory Open Access Journal |
| issn | 2391-5471 |
| language | English |
| last_indexed | 2024-04-11T10:50:56Z |
| publishDate | 2022-07-01 |
| publisher | De Gruyter |
| record_format | Article |
| series | Open Physics |
| spelling | doaj.art-53a74b12072445e8bc5b3f113f19b6d12022-12-22T04:28:54ZengDe GruyterOpen Physics2391-54712022-07-0120172472910.1515/phys-2022-0060Characterization of damage morphology of structural SiO2 film induced by nanosecond pulsed laserLi Yuan0Su Junhong1Xu Junqi2Yang Guoliang3School of Photoelectrical Engineering, Xi’an Technological University, Xi’an 710021, ChinaSchool of Photoelectrical Engineering, Xi’an Technological University, Xi’an 710021, ChinaSchool of Photoelectrical Engineering, Xi’an Technological University, Xi’an 710021, ChinaSchool of Photoelectrical Engineering, Xi’an Technological University, Xi’an 710021, ChinaWe investigated the damage morphology of porous silicon oxide film with a periodic hexagonal hole array irradiated by nanosecond pulsed laser, both experimentally and numerically. To understand the damage morphology, the temperature field distribution and the thermal stress distribution during the laser radiation process were investigated by finite element method. The simulation results show that the thermal stress regulated by periodic structural surface is the reason for the circumferential and discrete distribution of the damage points. The results provide ideas for improving the laser damage resistance of the structural surfaces.https://doi.org/10.1515/phys-2022-0060anti-reflectionlaser damagesurface morphologyperiodic porous surfacetemperature field distributionthermal stress field distribution |
| spellingShingle | Li Yuan Su Junhong Xu Junqi Yang Guoliang Characterization of damage morphology of structural SiO2 film induced by nanosecond pulsed laser Open Physics anti-reflection laser damage surface morphology periodic porous surface temperature field distribution thermal stress field distribution |
| title | Characterization of damage morphology of structural SiO2 film induced by nanosecond pulsed laser |
| title_full | Characterization of damage morphology of structural SiO2 film induced by nanosecond pulsed laser |
| title_fullStr | Characterization of damage morphology of structural SiO2 film induced by nanosecond pulsed laser |
| title_full_unstemmed | Characterization of damage morphology of structural SiO2 film induced by nanosecond pulsed laser |
| title_short | Characterization of damage morphology of structural SiO2 film induced by nanosecond pulsed laser |
| title_sort | characterization of damage morphology of structural sio2 film induced by nanosecond pulsed laser |
| topic | anti-reflection laser damage surface morphology periodic porous surface temperature field distribution thermal stress field distribution |
| url | https://doi.org/10.1515/phys-2022-0060 |
| work_keys_str_mv | AT liyuan characterizationofdamagemorphologyofstructuralsio2filminducedbynanosecondpulsedlaser AT sujunhong characterizationofdamagemorphologyofstructuralsio2filminducedbynanosecondpulsedlaser AT xujunqi characterizationofdamagemorphologyofstructuralsio2filminducedbynanosecondpulsedlaser AT yangguoliang characterizationofdamagemorphologyofstructuralsio2filminducedbynanosecondpulsedlaser |