Characterization of damage morphology of structural SiO2 film induced by nanosecond pulsed laser
We investigated the damage morphology of porous silicon oxide film with a periodic hexagonal hole array irradiated by nanosecond pulsed laser, both experimentally and numerically. To understand the damage morphology, the temperature field distribution and the thermal stress distribution during the l...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
De Gruyter
2022-07-01
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Series: | Open Physics |
Subjects: | |
Online Access: | https://doi.org/10.1515/phys-2022-0060 |