Ridge waveguides in Yb3+-doped silicate glass fabricated by combination of proton implantation and femtosecond laser ablation

Ridge waveguides were fabricated in Yb ^3+ -doped silicate glass by proton implantation combined with the femtosecond laser ablation. The Yb ^3+ -doped silicate glass were implanted by H ^+ ions with the double-energy (470 keV + 500 keV) at a total dose of 3 × 10 ^16 ions cm ^−2 for the formation of...

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Main Authors: Jing Bai, Xuewen Long, Ji Li, Chunxiao Liu
Format: Article
Language:English
Published: IOP Publishing 2020-01-01
Series:Materials Research Express
Subjects:
Online Access:https://doi.org/10.1088/2053-1591/abc219
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author Jing Bai
Xuewen Long
Ji Li
Chunxiao Liu
author_facet Jing Bai
Xuewen Long
Ji Li
Chunxiao Liu
author_sort Jing Bai
collection DOAJ
description Ridge waveguides were fabricated in Yb ^3+ -doped silicate glass by proton implantation combined with the femtosecond laser ablation. The Yb ^3+ -doped silicate glass were implanted by H ^+ ions with the double-energy (470 keV + 500 keV) at a total dose of 3 × 10 ^16 ions cm ^−2 for the formation of planar waveguides. After annealing at 260 °C, the double-line modification tracks, which provide lateral confinement of light to form ridge waveguide structures, were inscribed on the surface of sample with 3 μ J pulse laser energy, 50 μ m s ^−1 scan speed, and 25 μ m separation. The vacancy distribution of the original planar waveguide structure induced by the proton implantation was numerically calculated by the SRIM 2013. The near-field intensity distribution of the waveguide was measured by the end-face coupling system, which shows that the light can be well confined in the ridge waveguide. The micro-fluorescence features have been found well preserved in the waveguide region. This work indicates that the ridge waveguide fabricated by laser ablation assisted proton implantation in Yb ^3+ -doped silicate glass has an important potential as an active waveguide device in optical fiber communication and all-optical communication.
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spelling doaj.art-53a77b261f434cc2a3da88d46203c4452023-08-09T15:52:11ZengIOP PublishingMaterials Research Express2053-15912020-01-0171010520110.1088/2053-1591/abc219Ridge waveguides in Yb3+-doped silicate glass fabricated by combination of proton implantation and femtosecond laser ablationJing Bai0https://orcid.org/0000-0002-5800-2856Xuewen Long1Ji Li2Chunxiao Liu3https://orcid.org/0000-0002-0274-0075Department of Physics, Taiyuan Normal University , Jinzhong 030619, People’s Republic of ChinaDepartment of Physics, Huaihua University , Huaihua 418008, People’s Republic of ChinaDepartment of Physics, Taiyuan Normal University , Jinzhong 030619, People’s Republic of ChinaCollege of Electronic and Optical Engineering and College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, People’s Republic of ChinaRidge waveguides were fabricated in Yb ^3+ -doped silicate glass by proton implantation combined with the femtosecond laser ablation. The Yb ^3+ -doped silicate glass were implanted by H ^+ ions with the double-energy (470 keV + 500 keV) at a total dose of 3 × 10 ^16 ions cm ^−2 for the formation of planar waveguides. After annealing at 260 °C, the double-line modification tracks, which provide lateral confinement of light to form ridge waveguide structures, were inscribed on the surface of sample with 3 μ J pulse laser energy, 50 μ m s ^−1 scan speed, and 25 μ m separation. The vacancy distribution of the original planar waveguide structure induced by the proton implantation was numerically calculated by the SRIM 2013. The near-field intensity distribution of the waveguide was measured by the end-face coupling system, which shows that the light can be well confined in the ridge waveguide. The micro-fluorescence features have been found well preserved in the waveguide region. This work indicates that the ridge waveguide fabricated by laser ablation assisted proton implantation in Yb ^3+ -doped silicate glass has an important potential as an active waveguide device in optical fiber communication and all-optical communication.https://doi.org/10.1088/2053-1591/abc219Ridge optical waveguideYb3+-doped silicate glassion implantationfemtosecond laser ablation
spellingShingle Jing Bai
Xuewen Long
Ji Li
Chunxiao Liu
Ridge waveguides in Yb3+-doped silicate glass fabricated by combination of proton implantation and femtosecond laser ablation
Materials Research Express
Ridge optical waveguide
Yb3+-doped silicate glass
ion implantation
femtosecond laser ablation
title Ridge waveguides in Yb3+-doped silicate glass fabricated by combination of proton implantation and femtosecond laser ablation
title_full Ridge waveguides in Yb3+-doped silicate glass fabricated by combination of proton implantation and femtosecond laser ablation
title_fullStr Ridge waveguides in Yb3+-doped silicate glass fabricated by combination of proton implantation and femtosecond laser ablation
title_full_unstemmed Ridge waveguides in Yb3+-doped silicate glass fabricated by combination of proton implantation and femtosecond laser ablation
title_short Ridge waveguides in Yb3+-doped silicate glass fabricated by combination of proton implantation and femtosecond laser ablation
title_sort ridge waveguides in yb3 doped silicate glass fabricated by combination of proton implantation and femtosecond laser ablation
topic Ridge optical waveguide
Yb3+-doped silicate glass
ion implantation
femtosecond laser ablation
url https://doi.org/10.1088/2053-1591/abc219
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AT jili ridgewaveguidesinyb3dopedsilicateglassfabricatedbycombinationofprotonimplantationandfemtosecondlaserablation
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