Fast-Response Electrostatic Actuator Based on Nano-Gap
The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelect...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2017-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/8/3/78 |
| _version_ | 1828240105571090432 |
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| author | Edward Kostsov Alexei Sokolov |
| author_facet | Edward Kostsov Alexei Sokolov |
| author_sort | Edward Kostsov |
| collection | DOAJ |
| description | The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using microelectronic technology. It is demonstrated that the actuators are capable of maintaining forces with a specific density up to 106 N/m2 and up to 100–1000 N in real devices for 10–100 µs. Experimental research results of such actuators are presented. |
| first_indexed | 2024-04-12T21:34:26Z |
| format | Article |
| id | doaj.art-540d48d6026c4ac683c6c770beb97891 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-04-12T21:34:26Z |
| publishDate | 2017-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-540d48d6026c4ac683c6c770beb978912022-12-22T03:15:56ZengMDPI AGMicromachines2072-666X2017-03-01837810.3390/mi8030078mi8030078Fast-Response Electrostatic Actuator Based on Nano-GapEdward Kostsov0Alexei Sokolov1Lab Thin Ferroelectric Films Structure, Institute of Automation and Electrometry, Russian Academy of Science, Siberian Branch, Koptug Prosp.1, Novosibirsk 630090, RussiaLab Thin Ferroelectric Films Structure, Institute of Automation and Electrometry, Russian Academy of Science, Siberian Branch, Koptug Prosp.1, Novosibirsk 630090, RussiaThe possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using microelectronic technology. It is demonstrated that the actuators are capable of maintaining forces with a specific density up to 106 N/m2 and up to 100–1000 N in real devices for 10–100 µs. Experimental research results of such actuators are presented.http://www.mdpi.com/2072-666X/8/3/78electrostatic actuatorlarge forcenanometer gapferroelectricfast driver |
| spellingShingle | Edward Kostsov Alexei Sokolov Fast-Response Electrostatic Actuator Based on Nano-Gap Micromachines electrostatic actuator large force nanometer gap ferroelectric fast driver |
| title | Fast-Response Electrostatic Actuator Based on Nano-Gap |
| title_full | Fast-Response Electrostatic Actuator Based on Nano-Gap |
| title_fullStr | Fast-Response Electrostatic Actuator Based on Nano-Gap |
| title_full_unstemmed | Fast-Response Electrostatic Actuator Based on Nano-Gap |
| title_short | Fast-Response Electrostatic Actuator Based on Nano-Gap |
| title_sort | fast response electrostatic actuator based on nano gap |
| topic | electrostatic actuator large force nanometer gap ferroelectric fast driver |
| url | http://www.mdpi.com/2072-666X/8/3/78 |
| work_keys_str_mv | AT edwardkostsov fastresponseelectrostaticactuatorbasedonnanogap AT alexeisokolov fastresponseelectrostaticactuatorbasedonnanogap |