Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor

Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor

We developed a new approach to the fabrication of MEMS (Microelectromechanical system) substrates for gas sensors. This full screen-printing approach consists in the application of sacrificial material, which is solid at the near-room temperature of printing and becomes powder after firing of the el...

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Bibliographic Details
Main Authors:	Oleg Kul, Alexey Vasiliev, Andrey Nikitin, Anna Dmitrieva, Alexandr Bolshakov
Format:	Article
Language:	English
Published:	MDPI AG 2024-04-01
Series:	Proceedings
Subjects:	ceramic MEMS screen printing MOX thermocatalytic sensor
Online Access:	https://www.mdpi.com/2504-3900/97/1/128

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