A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array

A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). CMUT elements are easily made into a high-density array, which will increase the hardware complexity. In order to reduce the number of active channels, this paper stud...

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Bibliographic Details
Main Authors: Tian Zhang, Wendong Zhang, Xingling Shao, Yuhua Yang, Zhihao Wang, Yang Wu, Yu Pei
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Micromachines
Subjects:
CMUT
sparse array
ultrasound imaging
MEMS
Online Access:https://www.mdpi.com/2072-666X/12/6/684

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