On‐Chip Arrayed Waveguide Grating Fabricated on Thin‐Film Lithium Niobate
Herein, an on‐chip 8‐channel thin‐film lithium niobate (TFLN) arrayed waveguide grating (AWG) is designed and the device is fabricated using photolithography‐assisted chemo‐mechanical etching technique. The transmission of the fabricated TFLN AWG near the central wavelength of 1550 nm is experimenta...
Main Authors: | Zhe Wang, Zhiwei Fang, Zhaoxiang Liu, Youting Liang, Jian Liu, Jianping Yu, Ting Huang, Yuan Zhou, Haisu Zhang, Min Wang, Ya Cheng |
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Format: | Article |
Language: | English |
Published: |
Wiley-VCH
2024-02-01
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Series: | Advanced Photonics Research |
Subjects: | |
Online Access: | https://doi.org/10.1002/adpr.202300228 |
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