The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions
In this paper, we investigate the possibility of using gas mixer precursor for MOCVD to get sharper heterojunctions InxGa1-xAs, InxGa1-xAs и InxAl1-xAs. Nanolayers of that compositions are using in creations of quantum well devices like avalanche photodiode, QWIPs and so on.This devices needs sharp...
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| Format: | Article |
| Language: | Russian |
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MIREA - Russian Technological University
2014-08-01
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| Series: | Тонкие химические технологии |
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| Online Access: | https://www.finechem-mirea.ru/jour/article/view/455 |
| _version_ | 1826565777524785152 |
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| author | A. A. Gorskiy |
| author_facet | A. A. Gorskiy |
| author_sort | A. A. Gorskiy |
| collection | DOAJ |
| description | In this paper, we investigate the possibility of using gas mixer precursor for MOCVD to get sharper heterojunctions InxGa1-xAs, InxGa1-xAs и InxAl1-xAs. Nanolayers of that compositions are using in creations of quantum well devices like avalanche photodiode, QWIPs and so on.This devices needs sharp heterojunctions. For this purpose we used numerical studies of momentum and mass transport equations. 3D model of mixer was built in COMSOL Multiphysics. Results shows three streams: two peripheral and wide central. The shape and behavior was found independent from studying pressure ranges. That leads to applications of such gas mixer for vertical reactors of MOCVD but not for horizontal reactors. |
| first_indexed | 2024-04-10T03:29:37Z |
| format | Article |
| id | doaj.art-54eb56cad6454ae1b277acbfdff0a845 |
| institution | Directory Open Access Journal |
| issn | 2410-6593 2686-7575 |
| language | Russian |
| last_indexed | 2025-03-14T10:41:09Z |
| publishDate | 2014-08-01 |
| publisher | MIREA - Russian Technological University |
| record_format | Article |
| series | Тонкие химические технологии |
| spelling | doaj.art-54eb56cad6454ae1b277acbfdff0a8452025-03-02T10:57:32ZrusMIREA - Russian Technological UniversityТонкие химические технологии2410-65932686-75752014-08-01947072449The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctionsA. A. Gorskiy0M.V. Lomonosov Moscow State University of Fine Chemical Technologies, 86, Vernadskogo pr., Moscow 119571In this paper, we investigate the possibility of using gas mixer precursor for MOCVD to get sharper heterojunctions InxGa1-xAs, InxGa1-xAs и InxAl1-xAs. Nanolayers of that compositions are using in creations of quantum well devices like avalanche photodiode, QWIPs and so on.This devices needs sharp heterojunctions. For this purpose we used numerical studies of momentum and mass transport equations. 3D model of mixer was built in COMSOL Multiphysics. Results shows three streams: two peripheral and wide central. The shape and behavior was found independent from studying pressure ranges. That leads to applications of such gas mixer for vertical reactors of MOCVD but not for horizontal reactors.https://www.finechem-mirea.ru/jour/article/view/4553d model, mocvd, movpe, horizontal rector, gas mixer, inxga1-xas, numerical studying, heterojunctions |
| spellingShingle | A. A. Gorskiy The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions Тонкие химические технологии 3d model, mocvd, movpe, horizontal rector, gas mixer, inxga1-xas, numerical studying, heterojunctions |
| title | The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions |
| title_full | The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions |
| title_fullStr | The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions |
| title_full_unstemmed | The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions |
| title_short | The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions |
| title_sort | estimation of possibility of the using gas mixer for obtaining sharper mocvd grown heterojunctions |
| topic | 3d model, mocvd, movpe, horizontal rector, gas mixer, inxga1-xas, numerical studying, heterojunctions |
| url | https://www.finechem-mirea.ru/jour/article/view/455 |
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