The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions

The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions

In this paper, we investigate the possibility of using gas mixer precursor for MOCVD to get sharper heterojunctions InxGa1-xAs, InxGa1-xAs и InxAl1-xAs. Nanolayers of that compositions are using in creations of quantum well devices like avalanche photodiode, QWIPs and so on.This devices needs sharp...

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Bibliographic Details
Main Author:	A. A. Gorskiy
Format:	Article
Language:	Russian
Published:	MIREA - Russian Technological University 2014-08-01
Series:	Тонкие химические технологии
Subjects:	3d model, mocvd, movpe, horizontal rector, gas mixer, inxga1-xas, numerical studying, heterojunctions
Online Access:	https://www.finechem-mirea.ru/jour/article/view/455

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