Effects of background gas on sulfur hexafluoride removal by atmospheric dielectric barrier discharge plasma
The effects of background gases (He, Ar, N2 and air) on SF6 removal in a dielectric barrier reactor were investigated at atmospheric pressure. A comparison among these background gases was performed in terms of discharge voltage, discharge power, mean electron energy, electron density, removal effic...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-11-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4967277 |