Attentional Ptycho-Tomography (APT) for three-dimensional nanoscale X-ray imaging with minimal data acquisition and computation time
Abstract Noninvasive X-ray imaging of nanoscale three-dimensional objects, such as integrated circuits (ICs), generally requires two types of scanning: ptychographic, which is translational and returns estimates of the complex electromagnetic field through the IC; combined with a tomographic scan, w...
Main Authors: | Iksung Kang, Ziling Wu, Yi Jiang, Yudong Yao, Junjing Deng, Jeffrey Klug, Stefan Vogt, George Barbastathis |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2023-05-01
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Series: | Light: Science & Applications |
Online Access: | https://doi.org/10.1038/s41377-023-01181-8 |
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