Instability and Drift Phenomena in Switching RF-MEMS Microsystems
MEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices&#...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-02-01
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| Series: | Actuators |
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| Online Access: | https://www.mdpi.com/2076-0825/8/1/15 |
| _version_ | 1818140561693999104 |
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| author | Viviana Mulloni |
| author_facet | Viviana Mulloni |
| author_sort | Viviana Mulloni |
| collection | DOAJ |
| description | MEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices—the electrical actuation—the paper also analyzes other important effects related to instability phenomena, which are very common in this type of technology. Instabilities due to dielectric charge trapping, fabrication tolerances, mechanical deformation, contact wear, and temperature variation are duly analyzed, giving a comprehensive view of the complexity encountered in the reliable functioning of these apparently simple devices. |
| first_indexed | 2024-12-11T10:45:57Z |
| format | Article |
| id | doaj.art-564e05672f1c47b6908cc083b7291ce2 |
| institution | Directory Open Access Journal |
| issn | 2076-0825 |
| language | English |
| last_indexed | 2024-12-11T10:45:57Z |
| publishDate | 2019-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Actuators |
| spelling | doaj.art-564e05672f1c47b6908cc083b7291ce22022-12-22T01:10:29ZengMDPI AGActuators2076-08252019-02-01811510.3390/act8010015act8010015Instability and Drift Phenomena in Switching RF-MEMS MicrosystemsViviana Mulloni0Centre for Materials and Microsystems, Fondazione Bruno Kessler, 38123 Trento, ItalyMEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices—the electrical actuation—the paper also analyzes other important effects related to instability phenomena, which are very common in this type of technology. Instabilities due to dielectric charge trapping, fabrication tolerances, mechanical deformation, contact wear, and temperature variation are duly analyzed, giving a comprehensive view of the complexity encountered in the reliable functioning of these apparently simple devices.https://www.mdpi.com/2076-0825/8/1/15RF-MEMSRF switchelectrical actuation |
| spellingShingle | Viviana Mulloni Instability and Drift Phenomena in Switching RF-MEMS Microsystems Actuators RF-MEMS RF switch electrical actuation |
| title | Instability and Drift Phenomena in Switching RF-MEMS Microsystems |
| title_full | Instability and Drift Phenomena in Switching RF-MEMS Microsystems |
| title_fullStr | Instability and Drift Phenomena in Switching RF-MEMS Microsystems |
| title_full_unstemmed | Instability and Drift Phenomena in Switching RF-MEMS Microsystems |
| title_short | Instability and Drift Phenomena in Switching RF-MEMS Microsystems |
| title_sort | instability and drift phenomena in switching rf mems microsystems |
| topic | RF-MEMS RF switch electrical actuation |
| url | https://www.mdpi.com/2076-0825/8/1/15 |
| work_keys_str_mv | AT vivianamulloni instabilityanddriftphenomenainswitchingrfmemsmicrosystems |