Instability and Drift Phenomena in Switching RF-MEMS Microsystems
MEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices&#...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-02-01
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| Series: | Actuators |
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| Online Access: | https://www.mdpi.com/2076-0825/8/1/15 |