XCT and DLW: Synergies of Two Techniques at Sub-Micrometer Resolution

Direct Laser Writing (DLW) and X-ray computed tomography (XCT) both offer unique possibilities in their respective fields. DLW produces full three-dimensional (3D) polymer structures on the microscale with resolutions below 100 nm. The fabricated structures can be analysed by XCT or X-ray microscopy...

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Main Authors: Sven Fritzsche, Gerd-Rüdiger Jaenisch, Lina Pavasarytė, Alexander Funk
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/12/20/10488
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author Sven Fritzsche
Gerd-Rüdiger Jaenisch
Lina Pavasarytė
Alexander Funk
author_facet Sven Fritzsche
Gerd-Rüdiger Jaenisch
Lina Pavasarytė
Alexander Funk
author_sort Sven Fritzsche
collection DOAJ
description Direct Laser Writing (DLW) and X-ray computed tomography (XCT) both offer unique possibilities in their respective fields. DLW produces full three-dimensional (3D) polymer structures on the microscale with resolutions below 100 nm. The fabricated structures can be analysed by XCT or X-ray microscopy (XRM), which incorporates additional X-ray lenses, in three dimensions down to a minimal basic spatial resolution of about 500 nm or 50 nm, respectively. In this work, two different DLW structures are analysed via XCT. Internal defects are detected and analysed for the purpose of quality control. Defects and structures with sizes down to 1.5 µm are successfully analysed. A 3D reconstruction and internal, hidden features of the fabricated structures are shown and discussed. In a first-of-its-kind study, we demonstrate the detectability of a single-voxel line inside a fabricated structure that would not be detectable with SEM or light microscopy. Furthermore, the direct fabrication on a PET substrate is shown to overcome the high X-ray absorbance of commonly used glass substrates. Attenuation spectra of SZ2080 and glass substrates are compared to a fabrication route direct on a 170 µm PET foil. The practical aspects of XCT measurements for DLW structures on different substrates will be discussed.
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spelling doaj.art-569fd5e61c2540f4b5812ae072109e542023-11-23T22:45:32ZengMDPI AGApplied Sciences2076-34172022-10-0112201048810.3390/app122010488XCT and DLW: Synergies of Two Techniques at Sub-Micrometer ResolutionSven Fritzsche0Gerd-Rüdiger Jaenisch1Lina Pavasarytė2Alexander Funk3Bundesanstalt für Materialforschung und -prüfung, 12205 Berlin, GermanyBundesanstalt für Materialforschung und -prüfung, 12205 Berlin, GermanyBundesanstalt für Materialforschung und -prüfung, 12205 Berlin, GermanyBundesanstalt für Materialforschung und -prüfung, 12205 Berlin, GermanyDirect Laser Writing (DLW) and X-ray computed tomography (XCT) both offer unique possibilities in their respective fields. DLW produces full three-dimensional (3D) polymer structures on the microscale with resolutions below 100 nm. The fabricated structures can be analysed by XCT or X-ray microscopy (XRM), which incorporates additional X-ray lenses, in three dimensions down to a minimal basic spatial resolution of about 500 nm or 50 nm, respectively. In this work, two different DLW structures are analysed via XCT. Internal defects are detected and analysed for the purpose of quality control. Defects and structures with sizes down to 1.5 µm are successfully analysed. A 3D reconstruction and internal, hidden features of the fabricated structures are shown and discussed. In a first-of-its-kind study, we demonstrate the detectability of a single-voxel line inside a fabricated structure that would not be detectable with SEM or light microscopy. Furthermore, the direct fabrication on a PET substrate is shown to overcome the high X-ray absorbance of commonly used glass substrates. Attenuation spectra of SZ2080 and glass substrates are compared to a fabrication route direct on a 170 µm PET foil. The practical aspects of XCT measurements for DLW structures on different substrates will be discussed.https://www.mdpi.com/2076-3417/12/20/10488two-photon polymerizationX-ray microscopyXCT2PPdirect laser writingnon-destructive testing
spellingShingle Sven Fritzsche
Gerd-Rüdiger Jaenisch
Lina Pavasarytė
Alexander Funk
XCT and DLW: Synergies of Two Techniques at Sub-Micrometer Resolution
Applied Sciences
two-photon polymerization
X-ray microscopy
XCT
2PP
direct laser writing
non-destructive testing
title XCT and DLW: Synergies of Two Techniques at Sub-Micrometer Resolution
title_full XCT and DLW: Synergies of Two Techniques at Sub-Micrometer Resolution
title_fullStr XCT and DLW: Synergies of Two Techniques at Sub-Micrometer Resolution
title_full_unstemmed XCT and DLW: Synergies of Two Techniques at Sub-Micrometer Resolution
title_short XCT and DLW: Synergies of Two Techniques at Sub-Micrometer Resolution
title_sort xct and dlw synergies of two techniques at sub micrometer resolution
topic two-photon polymerization
X-ray microscopy
XCT
2PP
direct laser writing
non-destructive testing
url https://www.mdpi.com/2076-3417/12/20/10488
work_keys_str_mv AT svenfritzsche xctanddlwsynergiesoftwotechniquesatsubmicrometerresolution
AT gerdrudigerjaenisch xctanddlwsynergiesoftwotechniquesatsubmicrometerresolution
AT linapavasaryte xctanddlwsynergiesoftwotechniquesatsubmicrometerresolution
AT alexanderfunk xctanddlwsynergiesoftwotechniquesatsubmicrometerresolution