Deposition of 3YSZ-TiC PVD Coatings with High-Power Impulse Magnetron Sputtering (HiPIMS)

Deposition of 3YSZ-TiC PVD Coatings with High-Power Impulse Magnetron Sputtering (HiPIMS)

Optimized coating adhesion and strength are the advantages of high-power impulse magnetron sputtering (HiPIMS) as an innovative physical vapor deposition (PVD) process. When depositing electrically non-conductive oxide ceramics as coatings with HiPIMS without dual magnetron sputtering (DMS) or mid-f...

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Bibliographic Details
Main Authors:	Bastian Gaedike, Svenja Guth, Frank Kern, Andreas Killinger, Rainer Gadow
Format:	Article
Language:	English
Published:	MDPI AG 2021-03-01
Series:	Applied Sciences
Subjects:	coating characterization disappearing anode effect electrically conductive additives HiPIMS parameters yttria-stabilized zirconia
Online Access:	https://www.mdpi.com/2076-3417/11/6/2753

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