Clarification of Geometric Effects on Long-term Structural Stability of Ti/Au Multi-layered Micro-cantilevers

Clarification of Geometric Effects on Long-term Structural Stability of Ti/Au Multi-layered Micro-cantilevers

A gold micro-electro-mechanical-systems (Au-MEMS) capacitive accelerometer having Ti/Au multi-layered structures is a promising device to detect very weak accelerations, such as muscle sounds, because of the high mass density of Au. However, Au is a soft metal, which raises concerns about the struct...

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Bibliographic Details
Main Authors: Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone
Format: Article
Language:English
Published: Elsevier 2024-06-01
Series:Micro and Nano Engineering
Subjects:
Micro-electro-mechanical-systems capacitive accelerometers
Micro-cantilever
Ti/au multi-layered structures
Electrodeposited‑gold components
Long-term structure stability
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007224000078

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