Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules

In this article, based on the developed methodology, the stages of designing two designs of high-performance radio-frequency single-pole single-throw microelectromechanical switches are investigated. These radio-frequency microelectromechanical switches are designed to operate at a central resonant...

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Main Authors: Alexey Tkachenko, Igor Lysenko, Andrey Kovalev
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/2/477
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author Alexey Tkachenko
Igor Lysenko
Andrey Kovalev
author_facet Alexey Tkachenko
Igor Lysenko
Andrey Kovalev
author_sort Alexey Tkachenko
collection DOAJ
description In this article, based on the developed methodology, the stages of designing two designs of high-performance radio-frequency single-pole single-throw microelectromechanical switches are investigated. These radio-frequency microelectromechanical switches are designed to operate at a central resonant frequency of 3.6 GHz and 3.4 GHz, respectively, as well as to work both in mobile communication devices and in the design of the architecture of 5G mobile networks, in particular in arrays of integrated antennas and radio-frequency interface modules. The manufacture and study of two designed structures are researched. For the first manufactured experimental sample in the open state the insertion loss is no more than −0.69 dB and the reflection loss is −28.35 dB, and in the closed state the isolation value is at least −54.77 dB at a central resonant frequency of 3.6 GHz. For the second in the open state the value of the insertion loss is no more than −0.67 dB and the reflection loss is −20.7 dB, and in the closed state the isolation value is not less than −52.13 dB at the central resonant frequency of 3.4 GHz. Both manufactured experimental samples are characterized by high linearity, as well as a small value of contact resistance in the closed state.
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spelling doaj.art-579d14f5ffb64d188516f9dd09aa6b852023-11-16T22:12:47ZengMDPI AGMicromachines2072-666X2023-02-0114247710.3390/mi14020477Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End ModulesAlexey Tkachenko0Igor Lysenko1Andrey Kovalev2Design Center of the Microelectronic Component Base for Artificial Intelligence Systems, Southern Federal University, Taganrog 347922, RussiaDesign Center of the Microelectronic Component Base for Artificial Intelligence Systems, Southern Federal University, Taganrog 347922, RussiaDesign Center of the Microelectronic Component Base for Artificial Intelligence Systems, Southern Federal University, Taganrog 347922, RussiaIn this article, based on the developed methodology, the stages of designing two designs of high-performance radio-frequency single-pole single-throw microelectromechanical switches are investigated. These radio-frequency microelectromechanical switches are designed to operate at a central resonant frequency of 3.6 GHz and 3.4 GHz, respectively, as well as to work both in mobile communication devices and in the design of the architecture of 5G mobile networks, in particular in arrays of integrated antennas and radio-frequency interface modules. The manufacture and study of two designed structures are researched. For the first manufactured experimental sample in the open state the insertion loss is no more than −0.69 dB and the reflection loss is −28.35 dB, and in the closed state the isolation value is at least −54.77 dB at a central resonant frequency of 3.6 GHz. For the second in the open state the value of the insertion loss is no more than −0.67 dB and the reflection loss is −20.7 dB, and in the closed state the isolation value is not less than −52.13 dB at the central resonant frequency of 3.4 GHz. Both manufactured experimental samples are characterized by high linearity, as well as a small value of contact resistance in the closed state.https://www.mdpi.com/2072-666X/14/2/477microelectromechanical systemsMEMSradio-frequencyRFRF MEMSswitch
spellingShingle Alexey Tkachenko
Igor Lysenko
Andrey Kovalev
Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules
Micromachines
microelectromechanical systems
MEMS
radio-frequency
RF
RF MEMS
switch
title Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules
title_full Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules
title_fullStr Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules
title_full_unstemmed Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules
title_short Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules
title_sort investigation and research of high performance rf mems switches for use in the 5g rf front end modules
topic microelectromechanical systems
MEMS
radio-frequency
RF
RF MEMS
switch
url https://www.mdpi.com/2072-666X/14/2/477
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