A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film
In order to improve the response characteristics of the surface acoustic wave (SAW) sensor to trace gases, a SAW CO gas sensor based on a Pd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> film with a high-frequency response performance is proposed in this paper. T...
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MDPI AG
2023-02-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/23/5/2487 |
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| author | Haiyang Yang Bin Shen Xinlei Liu Chunbo Jin Tianshun Zhou |
| author_facet | Haiyang Yang Bin Shen Xinlei Liu Chunbo Jin Tianshun Zhou |
| author_sort | Haiyang Yang |
| collection | DOAJ |
| description | In order to improve the response characteristics of the surface acoustic wave (SAW) sensor to trace gases, a SAW CO gas sensor based on a Pd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> film with a high-frequency response performance is proposed in this paper. The gas sensitivity and humidity sensitivity of trace CO gas are tested and analyzed under normal temperatures and pressures. The research results show that, compared with the frequency response of the Pd–Pt/SnO<sub>2</sub> film, the CO gas sensor based on a Pd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> film has a higher frequency response performance, and the sensor has high-frequency response characteristics to CO gas with a concentration in the range of 10–100 ppm. The average response recovery time of 90% ranges from 33.4 s to 37.2 s, respectively. When the CO gas with a concentration of 30 ppm is tested repeatedly, its frequency fluctuation is less than 5%, indicating that the sensor has good stability. In the range of relative humidity (RH) from 25% to 75%, it also has high-frequency response characteristics for CO gas with a 20 ppm concentration. |
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| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-11T07:10:21Z |
| publishDate | 2023-02-01 |
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| series | Sensors |
| spelling | doaj.art-5818db08733040ea9303205d0f447fe32023-11-17T08:35:29ZengMDPI AGSensors1424-82202023-02-01235248710.3390/s23052487A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide FilmHaiyang Yang0Bin Shen1Xinlei Liu2Chunbo Jin3Tianshun Zhou4School of Safety Engineering, Heilongjiang University of Science and Technology, Harbin 150022, ChinaSchool of Safety Engineering, Heilongjiang University of Science and Technology, Harbin 150022, ChinaSchool of Safety Engineering, Heilongjiang University of Science and Technology, Harbin 150022, ChinaSchool of Safety Engineering, Heilongjiang University of Science and Technology, Harbin 150022, ChinaSchool of Safety Engineering, Heilongjiang University of Science and Technology, Harbin 150022, ChinaIn order to improve the response characteristics of the surface acoustic wave (SAW) sensor to trace gases, a SAW CO gas sensor based on a Pd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> film with a high-frequency response performance is proposed in this paper. The gas sensitivity and humidity sensitivity of trace CO gas are tested and analyzed under normal temperatures and pressures. The research results show that, compared with the frequency response of the Pd–Pt/SnO<sub>2</sub> film, the CO gas sensor based on a Pd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> film has a higher frequency response performance, and the sensor has high-frequency response characteristics to CO gas with a concentration in the range of 10–100 ppm. The average response recovery time of 90% ranges from 33.4 s to 37.2 s, respectively. When the CO gas with a concentration of 30 ppm is tested repeatedly, its frequency fluctuation is less than 5%, indicating that the sensor has good stability. In the range of relative humidity (RH) from 25% to 75%, it also has high-frequency response characteristics for CO gas with a 20 ppm concentration.https://www.mdpi.com/1424-8220/23/5/2487SAWPd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> thin filmCO gasgas sensitivityhumidity sensitivity |
| spellingShingle | Haiyang Yang Bin Shen Xinlei Liu Chunbo Jin Tianshun Zhou A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film Sensors SAW Pd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> thin film CO gas gas sensitivity humidity sensitivity |
| title | A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film |
| title_full | A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film |
| title_fullStr | A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film |
| title_full_unstemmed | A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film |
| title_short | A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film |
| title_sort | study on the gas humidity sensitivity of the high frequency saw co gas sensor based on noble metal modified metal oxide film |
| topic | SAW Pd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> thin film CO gas gas sensitivity humidity sensitivity |
| url | https://www.mdpi.com/1424-8220/23/5/2487 |
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