A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film

A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film

In order to improve the response characteristics of the surface acoustic wave (SAW) sensor to trace gases, a SAW CO gas sensor based on a Pd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> film with a high-frequency response performance is proposed in this paper. T...

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Bibliographic Details
Main Authors:	Haiyang Yang, Bin Shen, Xinlei Liu, Chunbo Jin, Tianshun Zhou
Format:	Article
Language:	English
Published:	MDPI AG 2023-02-01
Series:	Sensors
Subjects:	SAW Pd–Pt/SnO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> thin film CO gas gas sensitivity humidity sensitivity
Online Access:	https://www.mdpi.com/1424-8220/23/5/2487

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