Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) Interfaces

Abstract The versatility of properties displayed by two‐dimensional electron gases (2DEGs) at oxide interfaces has fostered intense research in hope of achieving exotic electromagnetic effects in confined systems. Of particular interest is the recently discovered superconducting state appearing in (...

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Main Authors: Hugo Witt, Srijani Mallik, Luis Moreno Vicente‐Arche, Gerbold Ménard, Guilhem Saïz, Daniela Stornaiuolo, Maria D'Antuono, Isabella Boventer, Nicolas Bergeal, Manuel Bibes
Format: Article
Language:English
Published: Wiley-VCH 2023-10-01
Series:Advanced Physics Research
Subjects:
Online Access:https://doi.org/10.1002/apxr.202200077
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author Hugo Witt
Srijani Mallik
Luis Moreno Vicente‐Arche
Gerbold Ménard
Guilhem Saïz
Daniela Stornaiuolo
Maria D'Antuono
Isabella Boventer
Nicolas Bergeal
Manuel Bibes
author_facet Hugo Witt
Srijani Mallik
Luis Moreno Vicente‐Arche
Gerbold Ménard
Guilhem Saïz
Daniela Stornaiuolo
Maria D'Antuono
Isabella Boventer
Nicolas Bergeal
Manuel Bibes
author_sort Hugo Witt
collection DOAJ
description Abstract The versatility of properties displayed by two‐dimensional electron gases (2DEGs) at oxide interfaces has fostered intense research in hope of achieving exotic electromagnetic effects in confined systems. Of particular interest is the recently discovered superconducting state appearing in (111)‐oriented KTaO3 interfaces, with a critical temperature Tc≈2 K, almost 10 times higher than that of SrTiO3‐based 2DEGs. Just as in SrTiO3‐based 2DEGs, fabricating devices in this new system is a technical challenge due to the fragility of the 2DEG and the propensity of bulk KTaO3 to become conducting outside the devices upon adventitious oxygen vacancy doping. Here, three different techniques are presented for patterning Hall bars in AlOx/KTaO3 (111) heterostructures. The devices show superconducting transitions ranging from 1.3  to 1.78 K, with limited degradation from the unpatterned thin film, and enable an efficient tuning of the carrier density by electric field effect. The array of techniques allows for the definition of channels with a large range of dimensions for the design of various kinds of devices to explore the properties of this system down to the nanoscale.
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spelling doaj.art-58e46bd1e84045d6b379ca7bbf9d59142023-10-13T05:35:24ZengWiley-VCHAdvanced Physics Research2751-12002023-10-01210n/an/a10.1002/apxr.202200077Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) InterfacesHugo Witt0Srijani Mallik1Luis Moreno Vicente‐Arche2Gerbold Ménard3Guilhem Saïz4Daniela Stornaiuolo5Maria D'Antuono6Isabella Boventer7Nicolas Bergeal8Manuel Bibes9Unité Mixte de Physique CNRS Thales Université Paris‐Saclay 1 Avenue Augustin Fresnel Palaiseau 91767 FranceUnité Mixte de Physique CNRS Thales Université Paris‐Saclay 1 Avenue Augustin Fresnel Palaiseau 91767 FranceUnité Mixte de Physique CNRS Thales Université Paris‐Saclay 1 Avenue Augustin Fresnel Palaiseau 91767 FranceLaboratoire de Physique et d'Etude des Matériaux ESPCI Paris Université PSL CNRS Sorbonne Université Paris 75005 FranceLaboratoire de Physique et d'Etude des Matériaux ESPCI Paris Université PSL CNRS Sorbonne Université Paris 75005 FranceCNR‐SPIN Complesso Monte S. Angelo, Via Cinthia Napoli 80126 ItalyCNR‐SPIN Complesso Monte S. Angelo, Via Cinthia Napoli 80126 ItalyUnité Mixte de Physique CNRS Thales Université Paris‐Saclay 1 Avenue Augustin Fresnel Palaiseau 91767 FranceLaboratoire de Physique et d'Etude des Matériaux ESPCI Paris Université PSL CNRS Sorbonne Université Paris 75005 FranceUnité Mixte de Physique CNRS Thales Université Paris‐Saclay 1 Avenue Augustin Fresnel Palaiseau 91767 FranceAbstract The versatility of properties displayed by two‐dimensional electron gases (2DEGs) at oxide interfaces has fostered intense research in hope of achieving exotic electromagnetic effects in confined systems. Of particular interest is the recently discovered superconducting state appearing in (111)‐oriented KTaO3 interfaces, with a critical temperature Tc≈2 K, almost 10 times higher than that of SrTiO3‐based 2DEGs. Just as in SrTiO3‐based 2DEGs, fabricating devices in this new system is a technical challenge due to the fragility of the 2DEG and the propensity of bulk KTaO3 to become conducting outside the devices upon adventitious oxygen vacancy doping. Here, three different techniques are presented for patterning Hall bars in AlOx/KTaO3 (111) heterostructures. The devices show superconducting transitions ranging from 1.3  to 1.78 K, with limited degradation from the unpatterned thin film, and enable an efficient tuning of the carrier density by electric field effect. The array of techniques allows for the definition of channels with a large range of dimensions for the design of various kinds of devices to explore the properties of this system down to the nanoscale.https://doi.org/10.1002/apxr.202200077field‐effect devicesKTaO3oxide interfacessuperconductivitytwo‐dimensional electron gas
spellingShingle Hugo Witt
Srijani Mallik
Luis Moreno Vicente‐Arche
Gerbold Ménard
Guilhem Saïz
Daniela Stornaiuolo
Maria D'Antuono
Isabella Boventer
Nicolas Bergeal
Manuel Bibes
Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) Interfaces
Advanced Physics Research
field‐effect devices
KTaO3
oxide interfaces
superconductivity
two‐dimensional electron gas
title Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) Interfaces
title_full Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) Interfaces
title_fullStr Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) Interfaces
title_full_unstemmed Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) Interfaces
title_short Patterning of Superconducting Two‐Dimensional Electron Gases based on AlOx/KTaO3 (111) Interfaces
title_sort patterning of superconducting two dimensional electron gases based on alox ktao3 111 interfaces
topic field‐effect devices
KTaO3
oxide interfaces
superconductivity
two‐dimensional electron gas
url https://doi.org/10.1002/apxr.202200077
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