Investigations on Long-Range AFM Scans Using a Nanofabrication Machine (NFM-100)

Investigations on Long-Range AFM Scans Using a Nanofabrication Machine (NFM-100)

The<b> </b>focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used especially for field-emission s...

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Bibliographic Details
Main Authors: Jaqueline Stauffenberg, Ingo Ortlepp, Christoph Reuter, Mathias Holz, Denis Dontsov, Christoph Schäffel, Steffen Strehle, Jens-Peter Zöllner, Ivo W. Rangelow, Eberhard Manske
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Proceedings
Subjects:
nanopositioning
nanometrology
AFM
self-sensing microcantilevers
Online Access:https://www.mdpi.com/2504-3900/56/1/34

Internet

https://www.mdpi.com/2504-3900/56/1/34

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