Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range
Abstract Fabricating flexible pressure sensors with high sensitivity in a broad pressure range is still a challenge. Herein, a flexible pressure sensor with engineered microstructures on polydimethylsiloxane (PDMS) film is designed. The high performance of the sensor derives from its unique pyramid‐...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2020-09-01
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| Series: | Advanced Science |
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| Online Access: | https://doi.org/10.1002/advs.202000154 |
| _version_ | 1811332764368109568 |
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| author | Gang Li Duo Chen Chenglong Li Wenxia Liu Hong Liu |
| author_facet | Gang Li Duo Chen Chenglong Li Wenxia Liu Hong Liu |
| author_sort | Gang Li |
| collection | DOAJ |
| description | Abstract Fabricating flexible pressure sensors with high sensitivity in a broad pressure range is still a challenge. Herein, a flexible pressure sensor with engineered microstructures on polydimethylsiloxane (PDMS) film is designed. The high performance of the sensor derives from its unique pyramid‐wall‐grid microstructure (PWGM). A square array of dome‐topped pyramids and crossed strengthening walls on the film forms a multiheight hierarchical microstructure. Two pieces of PWGM flexible PDMS film, stacked face‐to‐face, form a piezoresistive sensor endowed with ultrahigh sensitivity across a very broad pressure range. The sensitivity of the device is as high as 383 665.9 and 269 662.9 kPa−1 in the pressure ranges 0–1.6 and 1.6–6 kPa, respectively. In the higher pressure range of 6.1–11 kPa, the sensitivity is 48 689.1 kPa−1, and even in the very high pressure range of 11–56 kPa, it stays at 1266.8 kPa−1. The pressure sensor possesses excellent bending and torsional strain detection properties, is mechanically durable, and has potential applications in wearable biosensing for healthcare. In addition, 2 × 2 and 4 × 4 sensor arrays are prepared and characterized, suggesting the possibility of manufacturing a flexible tactile sensor. |
| first_indexed | 2024-04-13T16:41:54Z |
| format | Article |
| id | doaj.art-5924ae82657c48c392ff26be5444d908 |
| institution | Directory Open Access Journal |
| issn | 2198-3844 |
| language | English |
| last_indexed | 2024-04-13T16:41:54Z |
| publishDate | 2020-09-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advanced Science |
| spelling | doaj.art-5924ae82657c48c392ff26be5444d9082022-12-22T02:39:12ZengWileyAdvanced Science2198-38442020-09-01718n/an/a10.1002/advs.202000154Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure RangeGang Li0Duo Chen1Chenglong Li2Wenxia Liu3Hong Liu4State Key Laboratory of Biobased Materials and Green Papermaking Qilu University of Technology Shandong Academy of Science Jinan Shandong 250353 ChinaInstitute for Advanced Interdisciplinary Research University of Jinan (iAIR) Jinan 250022 ChinaState Key Laboratory of Biobased Materials and Green Papermaking Qilu University of Technology Shandong Academy of Science Jinan Shandong 250353 ChinaState Key Laboratory of Biobased Materials and Green Papermaking Qilu University of Technology Shandong Academy of Science Jinan Shandong 250353 ChinaInstitute for Advanced Interdisciplinary Research University of Jinan (iAIR) Jinan 250022 ChinaAbstract Fabricating flexible pressure sensors with high sensitivity in a broad pressure range is still a challenge. Herein, a flexible pressure sensor with engineered microstructures on polydimethylsiloxane (PDMS) film is designed. The high performance of the sensor derives from its unique pyramid‐wall‐grid microstructure (PWGM). A square array of dome‐topped pyramids and crossed strengthening walls on the film forms a multiheight hierarchical microstructure. Two pieces of PWGM flexible PDMS film, stacked face‐to‐face, form a piezoresistive sensor endowed with ultrahigh sensitivity across a very broad pressure range. The sensitivity of the device is as high as 383 665.9 and 269 662.9 kPa−1 in the pressure ranges 0–1.6 and 1.6–6 kPa, respectively. In the higher pressure range of 6.1–11 kPa, the sensitivity is 48 689.1 kPa−1, and even in the very high pressure range of 11–56 kPa, it stays at 1266.8 kPa−1. The pressure sensor possesses excellent bending and torsional strain detection properties, is mechanically durable, and has potential applications in wearable biosensing for healthcare. In addition, 2 × 2 and 4 × 4 sensor arrays are prepared and characterized, suggesting the possibility of manufacturing a flexible tactile sensor.https://doi.org/10.1002/advs.202000154engineered microstructuresflexible tactile sensorshierarchical deformation modeshighest sensitivitypiezoresistive pressure sensors |
| spellingShingle | Gang Li Duo Chen Chenglong Li Wenxia Liu Hong Liu Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range Advanced Science engineered microstructures flexible tactile sensors hierarchical deformation modes highest sensitivity piezoresistive pressure sensors |
| title | Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range |
| title_full | Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range |
| title_fullStr | Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range |
| title_full_unstemmed | Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range |
| title_short | Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range |
| title_sort | engineered microstructure derived hierarchical deformation of flexible pressure sensor induces a supersensitive piezoresistive property in broad pressure range |
| topic | engineered microstructures flexible tactile sensors hierarchical deformation modes highest sensitivity piezoresistive pressure sensors |
| url | https://doi.org/10.1002/advs.202000154 |
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