Mechanical characterization and cleaning of CVD single-layer h-BN resonators
Nanofabrication: optimized transfer enables hexagonal boron nitride mechanical resonators An improved transfer method allows easy placement of highly transparent and strongly adhesive hexagonal boron nitride on target substrates. A team led by Santiago J. Cartamil-Bueno at Delft University of Techno...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2017-06-01
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| Series: | npj 2D Materials and Applications |
| Online Access: | https://doi.org/10.1038/s41699-017-0020-8 |
| _version_ | 1819042240208568320 |
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| author | Santiago J. Cartamil-Bueno Matteo Cavalieri Ruizhi Wang Samer Houri Stephan Hofmann Herre S. J. van der Zant |
| author_facet | Santiago J. Cartamil-Bueno Matteo Cavalieri Ruizhi Wang Samer Houri Stephan Hofmann Herre S. J. van der Zant |
| author_sort | Santiago J. Cartamil-Bueno |
| collection | DOAJ |
| description | Nanofabrication: optimized transfer enables hexagonal boron nitride mechanical resonators An improved transfer method allows easy placement of highly transparent and strongly adhesive hexagonal boron nitride on target substrates. A team led by Santiago J. Cartamil-Bueno at Delft University of Technology developed a technique that enables the transfer of large-area, single-layer hexagonal boron nitride films grown by chemical vapor deposition onto a substrate of choice, whilst not requiring optical visualization. Following an additional cleaning step, the atomically thin membranes were transferred onto circular microcavities patterned on a silicon oxide substrate, resulting in the formation of suspended drums. Cleaning in harsh environments using a mixture of air and ozone is instrumental to a substantial improvement in the quality factor of the drums, indicating that undesired contamination causes damping of the mechanical motion. These results show promise for the development of sensitive hexagonal boron nitride resonators. |
| first_indexed | 2024-12-21T09:37:44Z |
| format | Article |
| id | doaj.art-59a75a5546394a3ea6d97b34ac32799e |
| institution | Directory Open Access Journal |
| issn | 2397-7132 |
| language | English |
| last_indexed | 2024-12-21T09:37:44Z |
| publishDate | 2017-06-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | npj 2D Materials and Applications |
| spelling | doaj.art-59a75a5546394a3ea6d97b34ac32799e2022-12-21T19:08:34ZengNature Portfolionpj 2D Materials and Applications2397-71322017-06-01111710.1038/s41699-017-0020-8Mechanical characterization and cleaning of CVD single-layer h-BN resonatorsSantiago J. Cartamil-Bueno0Matteo Cavalieri1Ruizhi Wang2Samer Houri3Stephan Hofmann4Herre S. J. van der Zant5Kavli Institute of Nanoscience, Delft University of TechnologyKavli Institute of Nanoscience, Delft University of TechnologyDepartment of Engineering, University of CambridgeKavli Institute of Nanoscience, Delft University of TechnologyDepartment of Engineering, University of CambridgeKavli Institute of Nanoscience, Delft University of TechnologyNanofabrication: optimized transfer enables hexagonal boron nitride mechanical resonators An improved transfer method allows easy placement of highly transparent and strongly adhesive hexagonal boron nitride on target substrates. A team led by Santiago J. Cartamil-Bueno at Delft University of Technology developed a technique that enables the transfer of large-area, single-layer hexagonal boron nitride films grown by chemical vapor deposition onto a substrate of choice, whilst not requiring optical visualization. Following an additional cleaning step, the atomically thin membranes were transferred onto circular microcavities patterned on a silicon oxide substrate, resulting in the formation of suspended drums. Cleaning in harsh environments using a mixture of air and ozone is instrumental to a substantial improvement in the quality factor of the drums, indicating that undesired contamination causes damping of the mechanical motion. These results show promise for the development of sensitive hexagonal boron nitride resonators.https://doi.org/10.1038/s41699-017-0020-8 |
| spellingShingle | Santiago J. Cartamil-Bueno Matteo Cavalieri Ruizhi Wang Samer Houri Stephan Hofmann Herre S. J. van der Zant Mechanical characterization and cleaning of CVD single-layer h-BN resonators npj 2D Materials and Applications |
| title | Mechanical characterization and cleaning of CVD single-layer h-BN resonators |
| title_full | Mechanical characterization and cleaning of CVD single-layer h-BN resonators |
| title_fullStr | Mechanical characterization and cleaning of CVD single-layer h-BN resonators |
| title_full_unstemmed | Mechanical characterization and cleaning of CVD single-layer h-BN resonators |
| title_short | Mechanical characterization and cleaning of CVD single-layer h-BN resonators |
| title_sort | mechanical characterization and cleaning of cvd single layer h bn resonators |
| url | https://doi.org/10.1038/s41699-017-0020-8 |
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