High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering
Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the st...
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MDPI AG
2019-02-01
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Series: | Entropy |
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Online Access: | https://www.mdpi.com/1099-4300/21/2/146 |
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author | Wei-Bing Liao Hongti Zhang Zhi-Yuan Liu Pei-Feng Li Jian-Jun Huang Chun-Yan Yu Yang Lu |
author_facet | Wei-Bing Liao Hongti Zhang Zhi-Yuan Liu Pei-Feng Li Jian-Jun Huang Chun-Yan Yu Yang Lu |
author_sort | Wei-Bing Liao |
collection | DOAJ |
description | Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al<sub>0.3</sub>CoCrFeNi HEATFs with a thickness of ~4 μm were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties. |
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language | English |
last_indexed | 2024-04-11T14:10:11Z |
publishDate | 2019-02-01 |
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series | Entropy |
spelling | doaj.art-59eac03d0e7f4675b8380036e3fd92652022-12-22T04:19:43ZengMDPI AGEntropy1099-43002019-02-0121214610.3390/e21020146e21020146High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron SputteringWei-Bing Liao0Hongti Zhang1Zhi-Yuan Liu2Pei-Feng Li3Jian-Jun Huang4Chun-Yan Yu5Yang Lu6College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaDepartment of Mechanical Engineering, City University of Hong Kong, Hong Kong, ChinaCollege of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, ChinaCollege of Materials Science and Engineering, Shenzhen University, Shenzhen 518060, ChinaCollege of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaCollege of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaDepartment of Mechanical Engineering, City University of Hong Kong, Hong Kong, ChinaRecently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al<sub>0.3</sub>CoCrFeNi HEATFs with a thickness of ~4 μm were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties.https://www.mdpi.com/1099-4300/21/2/146high-entropy alloysthin filmshardnessdeformation behaviorsnanocrystalline |
spellingShingle | Wei-Bing Liao Hongti Zhang Zhi-Yuan Liu Pei-Feng Li Jian-Jun Huang Chun-Yan Yu Yang Lu High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering Entropy high-entropy alloys thin films hardness deformation behaviors nanocrystalline |
title | High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering |
title_full | High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering |
title_fullStr | High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering |
title_full_unstemmed | High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering |
title_short | High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering |
title_sort | high strength and deformation mechanisms of al sub 0 3 sub cocrfeni high entropy alloy thin films fabricated by magnetron sputtering |
topic | high-entropy alloys thin films hardness deformation behaviors nanocrystalline |
url | https://www.mdpi.com/1099-4300/21/2/146 |
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