High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering

Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the st...

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Main Authors: Wei-Bing Liao, Hongti Zhang, Zhi-Yuan Liu, Pei-Feng Li, Jian-Jun Huang, Chun-Yan Yu, Yang Lu
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Series:Entropy
Subjects:
Online Access:https://www.mdpi.com/1099-4300/21/2/146
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author Wei-Bing Liao
Hongti Zhang
Zhi-Yuan Liu
Pei-Feng Li
Jian-Jun Huang
Chun-Yan Yu
Yang Lu
author_facet Wei-Bing Liao
Hongti Zhang
Zhi-Yuan Liu
Pei-Feng Li
Jian-Jun Huang
Chun-Yan Yu
Yang Lu
author_sort Wei-Bing Liao
collection DOAJ
description Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al<sub>0.3</sub>CoCrFeNi HEATFs with a thickness of ~4 &#956;m were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties.
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spelling doaj.art-59eac03d0e7f4675b8380036e3fd92652022-12-22T04:19:43ZengMDPI AGEntropy1099-43002019-02-0121214610.3390/e21020146e21020146High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron SputteringWei-Bing Liao0Hongti Zhang1Zhi-Yuan Liu2Pei-Feng Li3Jian-Jun Huang4Chun-Yan Yu5Yang Lu6College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaDepartment of Mechanical Engineering, City University of Hong Kong, Hong Kong, ChinaCollege of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, ChinaCollege of Materials Science and Engineering, Shenzhen University, Shenzhen 518060, ChinaCollege of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaCollege of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaDepartment of Mechanical Engineering, City University of Hong Kong, Hong Kong, ChinaRecently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al<sub>0.3</sub>CoCrFeNi HEATFs with a thickness of ~4 &#956;m were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties.https://www.mdpi.com/1099-4300/21/2/146high-entropy alloysthin filmshardnessdeformation behaviorsnanocrystalline
spellingShingle Wei-Bing Liao
Hongti Zhang
Zhi-Yuan Liu
Pei-Feng Li
Jian-Jun Huang
Chun-Yan Yu
Yang Lu
High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering
Entropy
high-entropy alloys
thin films
hardness
deformation behaviors
nanocrystalline
title High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering
title_full High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering
title_fullStr High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering
title_full_unstemmed High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering
title_short High Strength and Deformation Mechanisms of Al<sub>0.3</sub>CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering
title_sort high strength and deformation mechanisms of al sub 0 3 sub cocrfeni high entropy alloy thin films fabricated by magnetron sputtering
topic high-entropy alloys
thin films
hardness
deformation behaviors
nanocrystalline
url https://www.mdpi.com/1099-4300/21/2/146
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